Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 28, Issue 5, 455(2001)

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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References(12)

[1] [1] O. Sasaki, H. Okazaki. Sinusoidal phase modulating interferometry for surface profile measurement. Appl. Opt., 1986, 25(18):3137～3140

[2] [2] O. Sasaki, K. Takahashi. Sinusoidal phase modulating interferometer using optical fibers for displacement measurement. Appl. Opt., 1988, 27(19):4139～4142

[3] [3] O. Sasaki, K. Takahashi, T. Suzuki. Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance. Opt. Eng., 1990, 29(12):1511～1515

[4] [4] O. Sasaki, H. Sasazaki, T. Suzuki. Two-wavelength sinusoidal phase/modulating laser-diode interferometer insensitive to external disturbances. Appl. Opt., 1991, 30(28):4040～4045

[5] [5] O. Sasaki, T. Yoshida, T. Suzuki. Double sinusoidal phase-modulating laser diode interferometer for distance measurement. Appl. Opt., 1991, 30(25):3617～3621

[8] [8] T. Suzuki, O. Sasaki, S. Takayama et al.. Real-time displacement measurement using synchronous detection in a sinusoidal phase modulating interferometer. Opt. Eng., 1993, 32(5):1033～1037

[9] [9] T. Suzuki, T. Okada, O. Sasaki et al.. Real-time vibration measurement using a feedback type of laser diode interferometer with an optical fiber. Opt. Eng., 1997, 36(9):2496～2502

[10] [10] O. Sasaki, Y. Takebayashi, X. Z. Wang et al.. Exact measurement of flat surface profiles by object shifts in a phase-conjugate Fizeau interferometer. Opt. Eng., 1995, 34(10):2957～2963

[11] [11] O. Sasaki, X. Z. Wang. Phase-conjugate laser interferometers. Opt. Technol. Contact., 1997, 35:75～83

[12] [12] X. Z. Wang, O. Sasaki, T. Suzuki et al.. Measurement of small vibration amplitudes of a rough surface by an interferometer with a self-pumped phase-conjugate mirror. Appl. Opt., 2000, 39(25):4593～4597

[13] [13] X. Z. Wang, O. Sasaki, Y. Takebayashi et al.. Sinusoidal phase-modulating Fizeau interferometer using a self-pumped phase conjugator for surface profile measurements. Opt. Eng., 1994, 33(8):2670～2674

[14] [14] X. F. Wang, X. Z. Wang, F. Qian et al.. Photothermal modulation of laser diode wavelength: application to sinusoidal phase-modulating interferometer for displacement measurements. Optics & Laser Technology, 1999, 31(8):559～564

CLP Journals

[1] Aijun Zeng, Xiangzhao Wang, Dailin Li, Yang Bu, "A novel polarization modulator for a moire system with grating imaging," Chin. Opt. Lett. 3, 07407 (2005)

[2] Zhou Shaolin, Yang Yong, Chen Wangfu, Yan Wei, Ma Ping, Jiang Wenbo, Hu Song, Tang Xiaoping. Dual-Grating-Based Nanometer Measurement[J]. Acta Optica Sinica, 2009, 29(3): 702

[3] Song Helun, Li Huaqiang, Xian Hao, Yang Ruofu, Huang Jian, Jiang Wenhan. Application of Low-Coherence-Source Interferometric System to Phase Error Detection of Segmented Primary Mirrors for Large-Aperture Telescope[J]. Acta Optica Sinica, 2008, 28(8): 1523

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy[J]. Chinese Journal of Lasers, 2001, 28(5): 455

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Paper Information

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Received: Oct. 25, 2000

Accepted: --

Published Online: Aug. 10, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology