Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 28, Issue 5, 455(2001)

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy[J]. Chinese Journal of Lasers, 2001, 28(5): 455

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Paper Information

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Received: Oct. 25, 2000

Accepted: --

Published Online: Aug. 10, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology