Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 28, Issue 5, 455(2001)

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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In this paper, a new method is proposed to enlarge the measurement range of the LD-SPM interferometer with a photothermal wavelength modulation. Using this method, the measurement range is enlarged from half wavelength to 125.56 μm and the measurement accuracy is 1.2 nm. The possibility of further enlarging the measurement range is discussed.

Keywords

interferometer laser diode optical measurement photothermal modulation nanometer measurement

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy[J]. Chinese Journal of Lasers, 2001, 28(5): 455

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Paper Information

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Received: Oct. 25, 2000

Accepted: --

Published Online: Aug. 10, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology