Laser Journal, Volume. 46, Issue 2, 29(2025)

Fiber optic Fabry Perot cavity displacement sensor based on dual ring concave mirror structure

TAN Xin1,2, LI Zipeng1, YANG Qiao1, ZHANG Shuo1, HE Zhanqing1, WANG Jian1, and QI Hui1
Author Affiliations
  • 1School of Mechanical Engineering, Inner Mongolia University of Science and Technology, Baotou Inner Mongolia 014010, China
  • 2Key Laboratory of Micro-Nano Structure Design and Manufacturing Technology, Inner Mongolia University of Science and Technology, Baotou Inner Mongolia 014010, China
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    The severe safety hazards in buildings pose significant threats to personal and property safety. To effectively protect personal and property safety, the article proposes an optical fiber FP cavity displacement sensor with a dual-ring concave mirror structure for safety inspection. First, hydrofluoric acid is used for chemical etching to obtain a groove structure. Then, photoresist is used to create waveguides at the core position of the fiber. The fabricated fiber structure is then coated with a silver film using magnetron sputtering. Finally, the waveguide structure is washed away to obtain a double-ring concave mirror structure. Two fibers with the same structure form a Fabry-Perot cavity structure. The research results indicate that the dual-ring concave mirror structure can effectively enhance the sensitivity and linearity of the sensor. The designed sensor achieves a sensitivity of 105.535/μm within a range of 0-30 micrometers, with a linearity exceeding 0.999.

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    TAN Xin, LI Zipeng, YANG Qiao, ZHANG Shuo, HE Zhanqing, WANG Jian, QI Hui. Fiber optic Fabry Perot cavity displacement sensor based on dual ring concave mirror structure[J]. Laser Journal, 2025, 46(2): 29

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    Paper Information

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    Received: Jul. 26, 2024

    Accepted: Jun. 12, 2025

    Published Online: Jun. 12, 2025

    The Author Email:

    DOI:10.14016/j.cnki.jgzz.2025.02.029

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