Opto-Electronic Engineering, Volume. 30, Issue 4, 50(2003)
A piezomotor with high-resolution and large-stroke driving features
References(4)
[3] [3] SAKUTA S, UEDA K, OGAWA K, et al. Precision Dual Positioning System[J]. SPIE, 1990, 1334:10-17.
[4] [4] REAY N K. Sub-nanometer Precision Close-Loop Positioning for Optics and X-Y Stage Control Using Capacitance Displacement Sensors and Piezo-electric Actuators[J]. SPIE, 1993, 2088:150-159.
[5] [5] HARB S, SMITH S T, CHETWYND D G. Subnanometer Behavior of a Capacitive Feedback, Piezoelectric Displacement Actuator[J]. Rev. Sci. Instrum, 1992, 63(2) :1680-1689.
[6] [6] ATHERTON P D, XU Y, MCCONNELL M. New X-Y Stage for Precision Positioning and Scanning[J]. SPIE, 1996, 2865:15-20.
Tools
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese]. A piezomotor with high-resolution and large-stroke driving features[J]. Opto-Electronic Engineering, 2003, 30(4): 50
Paper Information
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20