High Power Laser and Particle Beams, Volume. 34, Issue 6, 064005(2022)
Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes
Figures & Tables(8)
Fig. 1. Schematic diagram of DC magnetron sputtering coating system
Fig. 3. System diagram of the vacuum system for analyzing vacuum properties of the tubular NEG tube
Fig. 4. SEM surface (a), cross-sectional (b) and (c) EDS mapping images of Ti-Zr-V films
Fig. 6. Initial CO sticking probability and CO pumping capacity as a function of activation temperature
Table 1. Coating parameters
View tableView in ArticleTable 1. Coating parameters
working pressure /Pa sputtering gas working current/A pulsed frequency/kHz based pressure/Pa depositing time/h magnetic field strength/T 1 Kr 0.1 50 1×10−5 8 0.02
Table 2. Results of ultimate vacuum measurement
View tableView in ArticleTable 2. Results of ultimate vacuum measurement
time/day pressure/Pa long tube short tube 1 2.08×10−9 9.26×10−9 10 2.04×10−9 1.77×10−8 close valve 30 1.96×10−9 3.17×10−8 60 1.52×10−9 2.82×10−8 90 1.32×10−9 1.71×10−8 120 1.02×10−9 9.30×10−9 150 9.6×10−10 9.40×10−9 180 9.2×10−10 9.18×10−9 360 — 8.20×10−9
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Bangle Zhu, Le Fan, Yuanzhi Hong, Sihui Wang, Wei Wei, Yigang Wang, Jianwei Fang, Yong Wang. Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes[J]. High Power Laser and Particle Beams, 2022, 34(6): 064005
Paper Information
Category: Particle Beams and Accelerator Technology
Received: Nov. 9, 2021
Accepted: Mar. 10, 2022
Published Online: Jun. 2, 2022
The Author Email: Le Fan (lefan@ustc.edu.cn), Yong Wang (ywang@ustc.edu.cn)
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