High Power Laser and Particle Beams, Volume. 34, Issue 6, 064005(2022)
Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes
Non-evaporable getter films are widely used in particle accelerators. It has become an integral part of many particle accelerators. Ti-Zr-V films were deposited on Si substrates and straight and bent Ag-Cu tubes with an inner diameter of 22 mm by DC magnetron sputtering. After baked at 180 ℃ for 24 h, the ultimate vacuum of the coated tubes reached 9.2×10-10 Pa. The tubes with activated getter films maintained at 9×10-9 Pa after closing tubes and ion pump valve. The pumping speed and capacity of Ti-Zr-V films were measured by Test Particle Monte Carlo method. The results show that the best CO sticking probability reaches 0.3, with a pumping capacity of 1.2 monolayer.
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Bangle Zhu, Le Fan, Yuanzhi Hong, Sihui Wang, Wei Wei, Yigang Wang, Jianwei Fang, Yong Wang. Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes[J]. High Power Laser and Particle Beams, 2022, 34(6): 064005
Category: Particle Beams and Accelerator Technology
Received: Nov. 9, 2021
Accepted: Mar. 10, 2022
Published Online: Jun. 2, 2022
The Author Email: Fan Le (lefan@ustc.edu.cn), Wang Yong (ywang@ustc.edu.cn)