High Power Laser and Particle Beams, Volume. 34, Issue 6, 064005(2022)

Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes

Bangle Zhu, Le Fan*, Yuanzhi Hong, Sihui Wang, Wei Wei, Yigang Wang, Jianwei Fang, and Yong Wang*
Author Affiliations
  • National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230026, China
  • show less

    Non-evaporable getter films are widely used in particle accelerators. It has become an integral part of many particle accelerators. Ti-Zr-V films were deposited on Si substrates and straight and bent Ag-Cu tubes with an inner diameter of 22 mm by DC magnetron sputtering. After baked at 180 ℃ for 24 h, the ultimate vacuum of the coated tubes reached 9.2×10-10 Pa. The tubes with activated getter films maintained at 9×10-9 Pa after closing tubes and ion pump valve. The pumping speed and capacity of Ti-Zr-V films were measured by Test Particle Monte Carlo method. The results show that the best CO sticking probability reaches 0.3, with a pumping capacity of 1.2 monolayer.

    Tools

    Get Citation

    Copy Citation Text

    Bangle Zhu, Le Fan, Yuanzhi Hong, Sihui Wang, Wei Wei, Yigang Wang, Jianwei Fang, Yong Wang. Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes[J]. High Power Laser and Particle Beams, 2022, 34(6): 064005

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Particle Beams and Accelerator Technology

    Received: Nov. 9, 2021

    Accepted: Mar. 10, 2022

    Published Online: Jun. 2, 2022

    The Author Email: Fan Le (lefan@ustc.edu.cn), Wang Yong (ywang@ustc.edu.cn)

    DOI:10.11884/HPLPB202234.210478

    Topics