Fig. 1. Schematic diagram of detector with XDL anode

Fig. 2. Equivalent circuit diagram of the resistive sensing layer

Fig. 3. Density distribution of electronic cloud cluster with different substrate thickness

Fig. 4. Schematic of single photon detector based on XDL anode

Fig. 5. Structure of delay line anode

Fig. 6. Schematic of experimental system

Fig. 7. Schematic of the experiment to the XDL anode

Fig. 8. Signal discrimination characteristic

Fig. 9. Dark count test

Fig. 10. Pinhole mask image

Fig. 11. Spatial resolution analysis results