Chinese Journal of Lasers, Volume. 36, Issue s2, 35(2009)

A Pyramidal Mirror Fabricated by Moving Mask Lithography Method

Wang Aina*... Yao Jun, Cai Dongmei, Pan Li and Li Fei |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    References(16)

    [1] [1] R. Ragazzoni. Pupil plane wavefront sensing with an oscillating prism[J]. J. Mod. Opt.,1996,43(2):289-293

    [2] [2] A. Burvall,E. Daly,S. R. Chamot et al.. Linearity of the pyramid wavefront sensor[J]. Opt. Express,2006,14(25):11925-11934

    [3] [3] C. Vérinaud. On the nature of the measurements provided by a pyramid wave-front sensor[J]. Opt. Commun.,2004,233(1-3):27-38

    [4] [4] B. J. Bauman. Optical Design For Extremely Large Telescope Adaptive Optics Systems[D]. America:University if Arizona,2003. 83-100

    [5] [5] J. M. LeDue. A Study of the Pyramid Sensor:Analytic Theory,Simulation and Experiment[D]. Canada:Dalhousie University,2002. 43-45

    [6] [6] J. B. Costa. Development of a New Infrared Pyramid Wavefront Sensor[D]. Germany :University of Heidelberg,2005. 53-56

    [7] [7] Wang Shengqian. Study of the Performace of the Sparse Synthetic Aperture Imaging System With Four Sub-Apertures[D]. Chengdu:Institute of Optics and Electronics,Chinese academy of Science,2008. 93-106

    [8] [8] F. Pérennès,M. Ghigo,M.Tormen et al.. Production of identical pyramid wavefront sensors for multi-conjugate adaptive optic systems using the LIGA process[J]. Microsystem Technologies,2004,10(6-7):552-555

    [9] [9] F. Pérennès,M. Ghigo,S. Cabrini. Characterisation of adaptive optic pyramid wavefront sensors fabricated by deep X-ray lithography[J]. Microelectronic Engineering,2003,67-68:566-573

    [10] [10] M. Ghigo,E. Diolaiti,F. Pérennès et al.. Use of the LIGA process for the production of pyramid wavefront sensors for adaptive optics in astronomy[C]. SPIE,2003,5169:55-61

    [11] [11] Chen Bo,Guo Lurong,Tang Jiyue et al.. Novel method for making parabolic grating[C]. SPIE,1996,2687:142-149

    [12] [12] Chunlei Du,Xiaochun Dong,Chuankai Qiu et al.. Profile control technology for high-performance microlens array[J]. Opt. Eng.,2004,43(11):2595-2602

    [13] [13] Lifang Shi,Chunlei Du,Xiaochun Dong et al.. Effective formation method for an aspherical microlens array based on an aperiodic moving mask during exposure[J]. Appl. Opt.,2007,46(33):8346-8350

    [14] [14] Chunlei Du,Xiaochun Dong,Qiling Deng et al.. Micro-optical structures formed by a mask moving method[J]. Optoelectron. Lett.,2007,3(2):95-98

    Tools

    Get Citation

    Copy Citation Text

    Wang Aina, Yao Jun, Cai Dongmei, Pan Li, Li Fei. A Pyramidal Mirror Fabricated by Moving Mask Lithography Method[J]. Chinese Journal of Lasers, 2009, 36(s2): 35

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: --

    Accepted: --

    Published Online: Dec. 30, 2009

    The Author Email: Wang Aina (wangaina1984@163.com)

    DOI:10.3788/cjl200936s2.0035

    Topics