Chinese Optics Letters, Volume. 1, Issue 7, 07420(2003)
Readout of super-resolution marks with Ti thin film
[1] [1] J. Tominaga and C. Mihelcea, Appl. Phys. Lett. 78, 2417 (2001).
[2] [2] J. Tominaga, T. Nakano, and N. Atoda, Proc. SPIE 4085, 36 (2001).
[3] [3] J. Tominaga, T. Nakano, and N. Atoda, Appl. Phys. Lett. 73, 2078 (1998).
[4] [4] T. Fukaya, J. Tominaga, T. Nakano, and N. Atoda, Appl. Phys. Lett. 75, 3114 (1999).
[5] [5] T. Nakano, A. Sato, H. Fuji, J. Tominaga, and N. Atoda, Appl. Phys. Lett. 75, 151 (1999).
[6] [6] J. Wei and F. Gan, Opt. Commun. 219, 261 (2003).
[7] [7] J. Wei and F. Gan, Appl. Phys. Lett. 82, 2607 (2003).
[8] [8] K. Yasuda, M. Ono, K. Aratani, A. Fukumoto, and M. Kaneko. Jpn. J. Appl. Phys. 32, 5210 (1993).
[9] [9] Y. Kasami, K. Yasuda, M. Ono, A. Fukumoto, and M. Kaneko. Jpn. J. Appl. Phys. 35, 423 (1996).
[10] [10] Y. Wu, H. Khoo, and T. Kogure, Appl. Phys. Lett. 64, 3225 (1994).
[11] [11] T. Kikukawa, T. Kato, H. Shingai, and H. Utsunomiya, Jpn. J. Appl. Phys. 40, 1624 (2001).
[12] [12] J. Wei, H. Ruan, H. Shi, and F. Gan, Chin. Sci. Bull. 47, 1604 (2002).
[13] [13] H. Ruan and J. Wei, Proc. SPIE 4930, 124 (2002).
[14] [14] J. Wei and F. Gan, Opt. Eng. 41, 2073 (2002).
[15] [15] J. Wei, H. Ruan, H. Shi, and F. Gan, Chin. Phys. 11, 1073 (2002).
[16] [16] J. Wei, H. Ruan, and F. Gan, Proc. SPIE 5060, 167 (2002).
[17] [17] J. Wei and F. Gan, Opt. Eng. 42, 1749 (2003).
[18] [18] B. Gijs and J. H. M. Sprait, Appl. Opt. 29, 3766 (1990).
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Jingsong Wei, Yang Wang, Wendong Xu, Zhenrong Sun, Feng Zhang, Fei Zhou, Fuxi Gan, "Readout of super-resolution marks with Ti thin film," Chin. Opt. Lett. 1, 07420 (2003)