INFRARED, Volume. 45, Issue 12, 40(2024)

Study on ZnS Thin Films Deposited by MagnetronSputtering and Their Properties

Yong-xi DAI, Tian-liang ZHENG, Jiao WANG, Kai ZHAO, and Qian LI
Author Affiliations
  • North China Institute of Electro-Optics, Beijing 100015, China
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    References(4)

    [1] [1] Dong H H, Jung H A, Kwun N H, et al. Structural and Optical Properties of ZnS Thin Films Deposited by RF Magnetron Sputtering[J]. Nanoscale Research Letters, 2012, 7(1): 26.

    [2] [2] Yoon Y G, Choi I H. Preparation of ZnS Thin Films by Using Photoassisted MOCVD[J]. Journal of the Korean Physical Society, 2013, 63(8): 1609-1614.

    [5] [5] Wang E G. Scale Study of Kingtics in Film Growth (I)[J]. Progress in Physics, 2003, 23(1): 1-61.

    [11] [11] Bashar M S, Rummana M, Munira S, et al. Effect of Rapid Thermal Annealing on Structural and Optical Properties of ZnS Thin Films Fabricated by RF Magnetron Sputtering Technique[J]. Journal of Theoretical and Applied Physics, 2020, 14(2): 53-63.

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    DAI Yong-xi, ZHENG Tian-liang, WANG Jiao, ZHAO Kai, LI Qian. Study on ZnS Thin Films Deposited by MagnetronSputtering and Their Properties[J]. INFRARED, 2024, 45(12): 40

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    Paper Information

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    Received: Nov. 21, 2023

    Accepted: Jan. 3, 2025

    Published Online: Jan. 3, 2025

    The Author Email:

    DOI:10.3969/j.issn.1672-8785.2024.12.006

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