Chinese Journal of Lasers, Volume. 36, Issue s1, 170(2009)

Precision Green Laser Trimming in Application of Film Pressure Sensor

Chen Zeming1、*, Wang Zhong1,2, Lu Feng2, Min Dayong1,2, and Lu Feixing2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(8)

    [1] [1] Song Yunduo, Tian Xingzhi, Liu Xuan. Design for optical system of laser resistor trimming machine[J]. Control & Automation, 2005, 21(12-1): 44~46

    [2] [2] Wang Ben, Shen Shuqun. Laser Scan and Compact Disc Technology[M]. BeiJing: Beijing University of Posts and Telecommunications Press,1990

    [3] [3] Lan Xinju. Laser Technique[M]. Wuhan: Huazhong University of Science and Technology Press, 1995

    [4] [4] Ji Xiuyuan, Zhang Baofeng, Xu Xiaoming. Research on cutting and carving machine of high speed[J]. J. Tianjin University of Technology, 2007, 23(3): 64~67

    [5] [5] Du Gang, Jiang Jingjie, Xu Hongjun. The design of the new-style numerical thermal-detector[J]. Control & Automation, 2005, 21(5): 169~170

    [6] [6] Li Jifan, Luo Yuanyu. Precise Electrical Measurement[M]. Beijing: China Metrology Publishing House, 1984

    [7] [7] Zhang Weiping .Modern Electronic Circuit Principle and Design[M]. Beijing: Atomic Energy Publishing House,1999

    [8] [8] K H Gerlach, J Jersch, K Dichmann et al.. Design and performance of an excimer laser based optical system for high precision micro-structuring[J]. Optics & LaserTechnology, 1997, 29(8): 439

    Tools

    Get Citation

    Copy Citation Text

    Chen Zeming, Wang Zhong, Lu Feng, Min Dayong, Lu Feixing. Precision Green Laser Trimming in Application of Film Pressure Sensor[J]. Chinese Journal of Lasers, 2009, 36(s1): 170

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: laser manufacturing

    Received: --

    Accepted: --

    Published Online: Jun. 18, 2009

    The Author Email: Zeming Chen (zmchen@hust.edu.cn)

    DOI:

    Topics