PhotoniX, Volume. 3, Issue 1, 6(2022)

Detection of surface defects and subsurface defects of polished optics with multisensor image fusion

Huanyu Sun1... Shiling Wang1, Xiaobo Hu1, Hongjie Liu2, Xiaoyan Zhou2, Jin Huang2, Xinglei Cheng1, Feng Sun1, Yubo Liu1, and Dong Liu1,34,* |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering: International Research Center for Advanced Photonics, Zhejiang University, Hangzhou 310027, China
  • 2Research Center of Laser Fusion, China Academy of Engineering Physics, No. 64 Mianshan Road, Mianyang 621000, China
  • 3Jiaxing Key Laboratory of Photonic Sensing & Intelligent Imaging, Jiaxing, 314000, China
  • 4Intelligent Optics & Photonics Research Center, Jiaxing Research Institute Zhejiang University, Jiaxing 314000, China
  • show less
    References(28)

    [11] [11] Kozlowski MR. Application of total internal reflection microscopy for laser damage studies on fused silica. Proc SPIE - The Int Soc Opt Eng. 1998;3244:282–95.

    [12] [12] Wang C, Tian A, Wang H, Li B, Jiang Z. Optical subsurface damage evaluation using LSCT. Proc SPIE – Int Soc OptEng. 2009;7522:75226K-1.

    [14] [14] Sergeeva M, Khrenikov K, Hellmuth T, Boerret R. Sub surface damage measurements based on short coherent interferometry. J Eur Opt Soc-Rapid. 2010;5:138–138.

    [18] [18] Liu H, Huang J, Wang F, Zhou X, Jiang X, Wu W, et al. Photoluminescence defects on subsurface layer of fused silica and its effects on laser damage performance. Proc SPIE – Int Soc Opt Eng. 2015;9255:92553V-1.

    [21] [21] Cook LM. Chemical processes in glass polishing. J Non·Cryst Solids. 1990;120:0–171.

    [27] [27] Heckbert PS. Graphics Gems IV. 4th ed. San Diego: Academic Press; 1994.

    Tools

    Get Citation

    Copy Citation Text

    Huanyu Sun, Shiling Wang, Xiaobo Hu, Hongjie Liu, Xiaoyan Zhou, Jin Huang, Xinglei Cheng, Feng Sun, Yubo Liu, Dong Liu. Detection of surface defects and subsurface defects of polished optics with multisensor image fusion[J]. PhotoniX, 2022, 3(1): 6

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Research Articles

    Received: Jan. 6, 2022

    Accepted: Feb. 25, 2022

    Published Online: Jul. 10, 2023

    The Author Email: Liu Dong (liudongopt@zju.edu.cn)

    DOI:10.1186/s43074-022-00051-7

    Topics