Preparation and Reliability of Anti-Reflection Film on Cyclic Olefin Copolymer Surface

Table 1. Physical properties of ZEONEX-350R
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Table 1. Physical properties of ZEONEX-350R
Parameter Value
Refractive index@550 nm 1.509
Water absorption /% <0.010
Young’s modulus /MPa 2800
Glass transition temperature /℃ 123
Coefficient of thermal expansion /K^-1 7.0×10^-5
Transmittance /% 92

Table 2. Thermal and mechanical parameters of thin films

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Table 2. Thermal and mechanical parameters of thin films

Material	Coefficient of thermal expansion /(10^-6 K^-1)	Young’s modulus /GPa	Thermal stress /(10⁸ Pa)
Ta₂O₅	6.6	115	4.221
H4	9.2	220	4.079
Ti₃O₅	8.8	230	4.292
ZrO₂	12.8	113	1.938
SiO₂	0.8	170	12.619
MgF₂	8.9	138.5	3.897
Al₂O₃	5.0	230	4.413

Table 3. Process parameters for ion beam source assisted deposition

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Table 3. Process parameters for ion beam source assisted deposition

DOENo.	Beam		ACC /V	$\frac{E}{B}$ /%	Flow rate ofO₂ in IBS /(mL·min^-1)	Flow rate ofAr in IBS /(mL·min^-1)	Flow rate of Arin neutralizer /( mL·min^-1)	Temperature /℃
DOENo.	Voltage /V	Current /mA	ACC /V	$\frac{E}{B}$ /%	Flow rate ofO₂ in IBS /(mL·min^-1)	Flow rate ofAr in IBS /(mL·min^-1)	Flow rate of Arin neutralizer /( mL·min^-1)	Temperature /℃
1								65
2	300	300	350	150	50	0	8	79
3	350	350	400	150	50	0	8	87
4	400	400	450	150	50	0	8	94
5	500	500	550	150	50	0	8	104

Table 4. Technological parameters for plasma treatment

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Table 4. Technological parameters for plasma treatment

Time / min	Beam		ACC /V	$\frac{E}{B}$ /%	Flow rate of O₂in IBS /( mL·min^-1)	Flow rate of Arin IBS /( mL·min^-1)	Flow rate of Ar inneutralizer /( mL·min^-1)
Time / min	Voltage /V	Current /mA	ACC /V	$\frac{E}{B}$ /%	Flow rate of O₂in IBS /( mL·min^-1)	Flow rate of Arin IBS /( mL·min^-1)	Flow rate of Ar inneutralizer /( mL·min^-1)
5	500	500	600	150	90	5	8
10	500	500	600	150	90	5	8
15	500	500	600	150	90	5	8

Table 5. Environmental test items and results

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Table 5. Environmental test items and results

Test item	Test method	Experimental phenomenon	Test result
Film adhesion test	3M tape with viscosity of no less than 3 N/cm²is used to quickly stretch sample surface filmfrom edge to center in vertical direction ofcoated surface	No film layer shedding	Passed
High and low temperaturetest	Without packaging, sample is kept at -40 ℃and 85 ℃ for 24 h	No crack in film layer	Passed
Constant temperature andhumidity test	Under condition of no packaging, sample is putinto constant temperature and humidity testchamber with temperature of 85 ℃ and relativehumidity of 85% for 24 h	No crack in film layer	Failed

Table 6. Process parameters for ion beam source bombardment

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Table 6. Process parameters for ion beam source bombardment

Time / min	Beam		ACC /V	$\frac{E}{B}$ /%	Flow rate of O₂in IBS /( mL·min^-1)	Flow rate of Arin IBS /( mL·min^-1)	Flow rate of Ar inneutralizer /( mL·min^-1)
Time / min	Voltage /V	Current /mA	ACC /V	$\frac{E}{B}$ /%	Flow rate of O₂in IBS /( mL·min^-1)	Flow rate of Arin IBS /( mL·min^-1)	Flow rate of Ar inneutralizer /( mL·min^-1)
5	400	400	400	150	50	0	8
5	600	600	600	150	50	0	8
5	800	800	800	150	50	0	8

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Xiuhua Fu, Junwei Li, Gong Zhang, Jing Zhang, Haijun Jin, Shuang Li. Preparation and Reliability of Anti-Reflection Film on Cyclic Olefin Copolymer Surface[J]. Chinese Journal of Lasers, 2021, 48(24): 2403003

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