Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Acta Optica Sinica, Volume. 41, Issue 16, 1622001(2021)

Study on Stressed Mirror Lapping and Testing of Φ380 mm Thin Mirror

Zibo Jiang1,2、*, Zhe Chen1,2, Xingtao Liu1,2, Xiaojie Jiao1,2,3, and Kunxin Chen1,2
Author Affiliations
  • 1Optical Technology with Large Aperture Research Department, National Astronomical Observatories/Nanjing Institute of Astronomical Optics & Technology, Chinese Academy of Sciences, Nanjing, Jiangsu 210042, China;
  • 2Key Laboratory of Astronomical Optics & Technology, Chinese Academy of Sciences, Nanjing, Jiangsu 210042, China;
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (13)
    Equations (0)
    References (22)
    Tools
    Paper Information
    Topics
    Figures & Tables(13)
    O-XYZ global coordinate system and o1-xyz local coordinate system of off-axis aspherical mirror

    Fig. 1. O-XYZ global coordinate system and o1-xyz local coordinate system of off-axis aspherical mirror

    Download full size
    TDDSA surface detection system

    Fig. 2. TDDSA surface detection system

    Download full size
    Significance and relation of different defocus coefficients

    Fig. 3. Significance and relation of different defocus coefficients

    Download full size
    Prestressed loading mechanism

    Fig. 4. Prestressed loading mechanism

    Download full size
    Zernike polynomial coefficient distribution curves of difference between mirror deformation and theoretical surface shape after multiple loading correction

    Fig. 5. Zernike polynomial coefficient distribution curves of difference between mirror deformation and theoretical surface shape after multiple loading correction

    Download full size
    Process scene of stressing lapping

    Fig. 6. Process scene of stressing lapping

    Download full size
    Convergence curves of stressing processing. (a) Stressing lapping experiment; (b) Ref. [8]

    Fig. 7. Convergence curves of stressing processing. (a) Stressing lapping experiment; (b) Ref. [8]

    Download full size
    Mirror surface roughness measurement site

    Fig. 8. Mirror surface roughness measurement site

    Download full size
    Relative deformation between meniscus and reference spherical mirror with 9 points Whiffletree support

    Fig. 9. Relative deformation between meniscus and reference spherical mirror with 9 points Whiffletree support

    Download full size
    Measuring of surface shape after stressing lapping using CMM

    Fig. 10. Measuring of surface shape after stressing lapping using CMM

    Download full size
    Final detection results of CMM and contact TDDSA. (a) Average surface shape obtained by multiple measurements using CMM; (b) average surface profile obtained by multiple measurements of contact TDDSA; (c) residual distribution between average surface profile and theoretical off-axis aspheric surface profile obtained by multiple measurements using CMM; (d) residual distribution between average surface profile and theoretical off-axis aspheric surface profile obtained by multiple measurements of contact TDDSA

    Fig. 11. Final detection results of CMM and contact TDDSA. (a) Average surface shape obtained by multiple measurements using CMM; (b) average surface profile obtained by multiple measurements of contact TDDSA; (c) residual distribution between average surface profile and theoretical off-axis aspheric surface profile obtained by multiple measurements using CMM; (d) residual distribution between average surface profile and theoretical off-axis aspheric surface profile obtained by multiple measurements of contact TDDSA

    Download full size

    • Table 1. Geometrical and material parameters of prestressed grinding experiments

      View table

      Table 1. Geometrical and material parameters of prestressed grinding experiments

      ParameterValue
      Conic constant-1
      Off-axis distance /m3
      Diameter /m0.380
      Maximum detectable radius /m0.179
      Thickness /m0.015
      ROC of reference mirror /m15.3856
      ROC of vertex /m15.0000
      ROC of comparative sphere /m15.4248
      Modulus of elasticity /GPa90.3
      Poisson ratio0.243
      Density /(kg·m-3)2580

    • Table 2. Detection results of CMM and contact type TDDSA

      View table

      Table 2. Detection results of CMM and contact type TDDSA

      CoefficientAverage value ofCMM test /μmAverage value ofTDDSA test /μm
      c20-6.5760-6.3500
      c22-20.4200-20.7460
      c2-2-0.67200.1510
      c31-0.5310-0.6940
      c3-1-0.0895-0.3540
      c40-0.8910-0.4420
      c330.09850.2400
      c3-3-0.0975-0.4330
      c42-0.0876-0.1210
      c4-20.0115-0.1910
      c510.0070-0.0615
      c5-1-0.04910.1160
      c60-0.2850-0.4750
    Tools

    Get Citation

    Copy Citation Text

    Zibo Jiang, Zhe Chen, Xingtao Liu, Xiaojie Jiao, Kunxin Chen. Study on Stressed Mirror Lapping and Testing of Φ380 mm Thin Mirror[J]. Acta Optica Sinica, 2021, 41(16): 1622001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Optical Design and Fabrication

    Received: Jan. 11, 2021

    Accepted: Mar. 18, 2021

    Published Online: Aug. 12, 2021

    The Author Email: Jiang Zibo (zbjiang@niaot.ac.cn)

    DOI:10.3788/AOS202141.1622001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology