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Chinese Optics Letters, Volume. 14, Issue 1, 011404(2016)

Grating-assisted fabrication of sub-wavelength ripples during femtosecond laser processing of dielectrics

Yanping Yuan* and Jimin Chen
Author Affiliations
  • Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
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    Schematic diagram of grating structure.

    Fig. 1. Schematic diagram of grating structure.

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    Spatial distributions of incident intensities at 120 fs and different grating constants: (a) flat structure (w=0 nm, d=0 nm, h=0 nm), (b) grating constant w=50 nm, d=100 nm, h=10 nm, (c) grating constant w=50 nm, d=120 nm, h=10 nm, and (d) grating constant w=70 nm, d=120 nm, h=10 nm.

    Fig. 2. Spatial distributions of incident intensities at 120 fs and different grating constants: (a) flat structure (w=0  nm, d=0  nm, h=0  nm), (b) grating constant w=50  nm, d=100  nm, h=10  nm, (c) grating constant w=50  nm, d=120  nm, h=10  nm, and (d) grating constant w=70  nm, d=120  nm, h=10  nm.

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    Spatial distributions of SP-laser coupling intensities at 120 fs and different grating constants: (a) flat structure, (b) grating constant w=50 nm, d=100 nm, h=10 nm, (c) grating constant w=50 nm, d=120 nm, h=10 nm, and (d) grating constant w=70 nm, d=120 nm, h=10 nm.

    Fig. 3. Spatial distributions of SP-laser coupling intensities at 120 fs and different grating constants: (a) flat structure, (b) grating constant w=50  nm, d=100  nm, h=10  nm, (c) grating constant w=50  nm, d=120  nm, h=10  nm, and (d) grating constant w=70  nm, d=120  nm, h=10  nm.

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    Spatial distributions of free electron density and ablation shapes at the end of laser pulse train irradiation and different grating constants: (a) flat structure, (b) grating constant w=50 nm, d=100 nm, h=10 nm, (c) grating constant w=50 nm, d=120 nm, h=10 nm, and (d) grating constant w=70 nm, d=120 nm, h=10 nm.

    Fig. 4. Spatial distributions of free electron density and ablation shapes at the end of laser pulse train irradiation and different grating constants: (a) flat structure, (b) grating constant w=50  nm, d=100  nm, h=10  nm, (c) grating constant w=50  nm, d=120  nm, h=10  nm, and (d) grating constant w=70  nm, d=120  nm, h=10  nm.

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    Yanping Yuan, Jimin Chen, "Grating-assisted fabrication of sub-wavelength ripples during femtosecond laser processing of dielectrics," Chin. Opt. Lett. 14, 011404 (2016)

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Sep. 30, 2015

    Accepted: Nov. 6, 2015

    Published Online: Aug. 6, 2018

    The Author Email: Yanping Yuan (ypyuan@bjut.edu.cn)

    DOI:10.3788/COL201614.011404

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology