Chinese Journal of Lasers, Volume. 43, Issue 11, 1101003(2016)
Research on Fabrication and Vertical Coupling of 45° Micromirror with Laser Stepped Ablation Method
[1] [1] Matsui J, Yamamoto T, Tanaka K, et al. Optical interconnect architecture for servers using high bandwidth optical mid-plane[C]. Optical Fiber Communication Conference, 2012: OW3J. 6.
[2] [2] Taubenblatt M A. Optical interconnects for high-performance computing[J]. Journal of Lightwave Technology, 2012, 30(4): 448-458.
[3] [3] Kachris C, Tomkos I. A survey on optical interconnects for data centers[J]. IEEE Communications Surveys & Tutorials, 2012, 14(4): 1021-1036.
[4] [4] Ghiasi A. Large data centers interconnect bottlenecks[J]. Optics Express, 2015, 23(3): 2085-2090.
[5] [5] Dangel R, Horst F, Jubin D, et al. Development of versatile polymer waveguide flex technology for use in optical interconnects[J]. Journal of Lightwave Technology, 2013, 31(24): 3915-3926.
[6] [6] Tan M R, Rosenberg P K, Mathai S, et al. Low cost, injection molded 120 Gbps optical backplane[C]. Optical Fiber Communication Coference/National Fiber Optical Engineers Conference, 2011: PDPA4.
[7] [7] Rho B S, Kang S, Cho H S, et al. PCB-compatible optical interconnection using 45-ended connection rods and via-holed waveguides[J]. Journal of Lightwave Technology, 2004, 22(9): 2128-2134.
[8] [8] van Steenberge G, Geerinck P, van Put S, et al. MT-compatible laser-ablated interconnections for optical printed circuit boards[J]. Journal of Lightwave Technology, 2004, 22(9): 2083-2090.
[9] [9] van Erps J, Hendrickx N, Debaes C, et al. Discrete out-of-plane coupling components for printed circuit board-level optical interconnections[J]. IEEE Photonics Technology Letters, 2007, 19(21): 1753-1755.
[10] [10] Hendrickx N, van Erps J, Bosman E, et al. Embedded micromirror inserts for optical printed circuit boards[J]. IEEE Photonics Technology Letters, 2008, 20(20): 1727-1729.
[11] [11] Bierhoff T, Schrage J, Halter M, et al. All optical pluggable board-backplane interconnection system based on an MPXTM-FlexTail connector solution[C].2010 IEEE Photonics Society Winter Topicals Meeting Series (WTM), 2010: 91-92.
[12] [12] Cho M H, Hwang S H, Cho H S, et al. High-coupling-efficiency optical interconnection using a 90°-bent fiber array connector in optical printed circuit boards[J]. IEEE Photonics Technology Letters, 2005, 17(3): 690-692.
[13] [13] Taillaert D, van Laere F, Ayre M, et al. Grating couplers for coupling between optical fibers and nanophotonic waveguides[J]. Japanese Journal of Applied Physics, 2006, 45(8A): 6071-6077.
[14] [14] Yoshimura R, Hikita M, Usui M, et al. Polymeric optical waveguide films with 45° mirrors formed with a 90° V-shaped diamond blade[J]. Electron Letters, 1997, 33(15): 1311-1312.
[15] [15] Cho I K, Lee W J, Rho B S, et al. Polymer waveguide with integrated reflector mirrors for an inter-chip link system[J]. Optics Communications, 2008, 281(19): 4906-4909.
[16] [16] Kim J S, Kim J J. Fabrication of multimode polymeric waveguides and micromirrors using deep X-ray lithography[J]. IEEE Photonics Technology Letters, 2004, 16(3): 798-800.
[17] [17] Wang F T, Liu F H, Adibi A. 45 degree polymer micromirror integration for board-level three-dimensional optical interconnects[J]. Optics Express, 2009, 17(13): 10514-10521.
[18] [18] Hendrickx N, van Erps J, van Steenberge G, et al. Laser ablated micromirrors for printed circuit board integrated optical interconnections[J]. IEEE Photonics Technology Letters, 2007, 19(11): 822-824.
[19] [19] Jia Nana, Deng Chuanlu, Pang Fufei, et al. Research on excimer laser etching technology for achieving optical waveguide end face[J]. Chinese J Lasers, 2015, 42(3): 0303012.
[20] [20] Zakariyah S S. Laser ablation for polymer waveguide fabrication[D]. Loughborough: Loughborough Innovation Centre, 2012.
[21] [21] Tian Laike, Teng Lin. Angle and light scattering[J]. Acta Photonica Sinica, 1997, 26(11): 1028-1030.
[22] [22] Hu J J, Feng N N, Carlie N, et al. Optical loss reduction in high-index-contrast chalcogenide glass waveguides via thermal reflow[J]. Optics Express, 2010, 18(2): 1469-1478.
Get Citation
Copy Citation Text
Deng Chuanlu, Song Zhiqiang, Pang Fufei, Wang Jianhui, Wang Tingyun. Research on Fabrication and Vertical Coupling of 45° Micromirror with Laser Stepped Ablation Method[J]. Chinese Journal of Lasers, 2016, 43(11): 1101003
Category: laser devices and laser physics
Received: May. 28, 2016
Accepted: --
Published Online: Nov. 10, 2016
The Author Email: Deng Chuanlu (chuanludeng@163.com)