Fig. 1. (a) Actuators arrangement, (b) the experimental measured influence function, and (c) the correction capability of wave-front errors of the 145-element PZT DM.

Fig. 2. Transverse curve of the pupil profiles of (a) filter1 and (b) filter2, the normalized transverse intensity distribution of (c) filter1, and (d) filter2, and the axial intensity distribution of (e) filter1 and (f) filter2 compared with that of Airy spot.

Fig. 3. Experimental setup for attaining phase modulation using a 145-element PZT DM.

Fig. 4. Expected filter profiles of (a) filter1 and (b) filter2, the fitted profiles of (c) filter1 and (d) filter2, and the fitting residual errors of (e) filter1 and (f) filter2.

Fig. 5. Experimental measurements of the intensity distribution at the geometrical focal plane obtained from (a) free pupil, (b) super-resolution filter1, and (c) super-resolution filter2.

Fig. 6. Horizontal cross curves of Fig. 5.

Fig. 7. Experimental measurements of two-dimensional intensity plots at different axial positions marked in Figs. 2(e) and 2(f): (a) filter1, (b) filter2.