[1] [1] Goel A, Manik G. Solar thermal system—an insight into parabolic trough solar collector and its modeling. Renewable Energy Systems: Elsevier; 2021. p. 309–37.

[2] [2] Dudley B. BP statistical review of world energy. BP Stat Rev London, UK. 2018;2018(6):00116.

[3] [3] by fuel type-Exajoules, C. bp Statistical Review of World Energy. 2006

[4] [4] Shafiee S, Topal E. When will fossil fuel reserves be diminished? Energy Policy. 2009;37(1):181–9.10.1016/j.enpol.2008.08.016

[5] [5] Da Rosa AV, Ordóñez JC. Fundamentals of renewable energy processes: Academic; 2021.

[6] [6] World Energy Council. World energy resources report; 2016.

[7] [7] Twidell J. Renewable energy resources: Routledge; 2021.10.4324/9780429452161

[8] [8] Kamran M, Fazal MR. Fundamentals of renewable energy systems: Academic; 2021.

[9] [9] Mekhilef S, Saidur R, Safari A. A review on solar energy use in industries. Renew Sust Energ Rev. 2011;15(4):1777–90.10.1016/j.rser.2010.12.018

[10] [10] Sherwood AN, Nikolic M, Humphrey JW, et al. Greek and Roman technology: a sourcebook: annotated translations of Greek and Latin texts and documents: Routledge; 2003.10.4324/9780203413258

[11] [11] Plantzos D. Crystals and lenses in the Graeco-Roman world. Am J Archaeol. 1997;101(3):451–64.10.2307/507106

[12] [12] Meijer F. A history of seafaring in the classical world (Routledge revivals): Routledge; 2014.10.4324/9781315779980

[13] [13] Tian Y, Zhao C-Y. A review of solar collectors and thermal energy storage in solar thermal applications. Appl Energy. 2013;104:538–53.10.1016/j.apenergy.2012.11.051

[14] [14] Romero M, Steinfeld A. Concentrating solar thermal power and thermochemical fuels. Energy Environ Sci. 2012;5(11):9234–45.10.1039/c2ee21275g

[15] [15] Lovegrove K, Stein W. Concentrating solar power technology: principles. Developments and Applications: Woodhead Publishing; 2012.10.1533/9780857096173

[16] [16] Nation DD, Heggs PJ, Dixon-Hardy DW. Modelling and simulation of a novel electrical energy storage (EES) receiver for solar parabolic trough collector (PTC) power plants. Appl Energy. 2017;195:950–73.10.1016/j.apenergy.2017.03.084

[17] [17] Hossain M, Saidur R, Fayaz H, et al. Review on solar water heater collector and thermal energy performance of circulating pipe. Renew Sust Energ Rev. 2011;15(8):3801–12.10.1016/j.rser.2011.06.008

[18] [18] Hossain E, Petrovic S. Solar thermal energy. In: Renewable energy crash course: Springer; 2021. p. 61–8.10.1007/978-3-030-70049-2_7

[19] [19] Hachicha AA, Yousef BA, Said Z, et al. A review study on the modeling of high-temperature solar thermal collector systems. Renew Sust Energ Rev. 2019;112:280–98.10.1016/j.rser.2019.05.056

[20] [20] Blanco M. Advances in concentrating solar thermal research and technology: Woodhead Publishing; 2016.

[21] [21] Islam MT, Huda N, Abdullah A, et al. A comprehensive review of state-of-the-art concentrating solar power (CSP) technologies: current status and research trends. Renew Sust Energ Rev. 2018;91:987–1018.10.1016/j.rser.2018.04.097

[22] [22] Esen M. Thermal performance of a solar cooker integrated vacuum-tube collector with heat pipes containing different refrigerants. Sol Energy. 2004;76(6):751–7.10.1016/j.solener.2003.12.009

[23] [23] Esen M, Esen H. Experimental investigation of a two-phase closed thermosyphon solar water heater. Sol Energy. 2005;79(5):459–68.10.1016/j.solener.2005.01.001

[24] [24] Alam T, Saini R, Saini J. Heat transfer enhancement due to V-shaped perforated blocks in a solar air heater duct. In: Applied mechanics and materials; 2014. p. 125–9. Trans Tech Publ.

[25] [25] Alam T, Kim M-H. Numerical study on thermal hydraulic performance improvement in solar air heater duct with semi ellipse shaped obstacles. Energy. 2016;112:588–98.10.1016/j.energy.2016.06.105

[26] [26] Esen M, Yuksel T. Experimental evaluation of using various renewable energy sources for heating a greenhouse. Energy Build. 2013;65:340–51.10.1016/j.enbuild.2013.06.018

[27] [27] Al-harahsheh M, Abu-Arabi M, Mousa H, et al. Solar desalination using solar still enhanced by external solar collector and PCM. Appl Therm Eng. 2018;128:1030–40.10.1016/j.applthermaleng.2017.09.073

[28] [28] Garg HP, Mullick S, Bhargava VK. Solar thermal energy storage: Springer Science & Business Media; 2012.

[29] [29] Mehrali M, Johan E, Shahi M, et al. Simultaneous solar-thermal energy harvesting and storage via shape stabilized salt hydrate phase change material. Chem Eng J. 2021;405:126624.10.1016/j.cej.2020.126624

[30] [30] Li Y, Chen Y, Huang X, et al. Anisotropy-functionalized cellulose-based phase change materials with reinforced solar-thermal energy conversion and storage capacity. Chem Eng J. 2021;415:129086.10.1016/j.cej.2021.129086

[31] [31] Sharma V, Kumar A, Sastry O, et al. Performance assessment of different solar photovoltaic technologies under similar outdoor conditions. Energy. 2013;58:511–8.10.1016/j.energy.2013.05.068

[32] [32] Grätzel M. Solar energy conversion by dye-sensitized photovoltaic cells. Inorg Chem. 2005;44(20):6841–51.10.1021/ic0508371

[33] [33] Izquierdo S, Montañés C, Dopazo C, et al. Analysis of CSP plants for the definition of energy policies: the influence on electricity cost of solar multiples, capacity factors and energy storage. Energy Policy. 2010;38(10):6215–21.10.1016/j.enpol.2010.06.009

[34] [34] Yılmaz İH, Mwesigye A. Modeling, simulation and performance analysis of parabolic trough solar collectors: a comprehensive review. Appl Energy. 2018;225:135–74.10.1016/j.apenergy.2018.05.014

[35] [35] Bellos E, Tzivanidis C. Alternative designs of parabolic trough solar collectors. Prog Energy Combust Sci. 2019;71:81–117.10.1016/j.pecs.2018.11.001

[36] [36] Rasul M. Clean energy for sustainable development: comparisons and contrasts of new approaches: Academic; 2016.

[37] [37] Suman S, Khan MK, Pathak M. Performance enhancement of solar collectors—a review. Renew Sust Energ Rev. 2015;49:192–210.10.1016/j.rser.2015.04.087

[38] [38] Kalogirou SA. Solar thermal collectors and applications. Prog Energy Combust Sci. 2004;30(3):231–95.10.1016/j.pecs.2004.02.001

[39] [39] Zayed ME, Zhao J, Elsheikh AH, et al. Applications of cascaded phase change materials in solar water collector storage tanks: a review. Sol Energy Mater Sol Cells. 2019;199:24–49.10.1016/j.solmat.2019.04.018

[40] [40] Mancini T, Heller P, Butler B, et al. Dish-Stirling systems: An overview of development and status. J Sol Energy Eng. 2003;125(2):135–51.10.1115/1.1562634

[41] [41] Stine W, Diver R. A compendium of solar dish Stirling technology. Report SAND 937026. Albuquerque: Sandia National Laboratories; 1994.

[42] [42] Kearney A. Solar thermal electricity 2025. Clean electricity on demand: Atractive STE cost stabilize energy production; 2010.

[43] [43] Ho CK, Iverson BD. Review of high-temperature central receiver designs for concentrating solar power. Renew Sust Energ Rev. 2014;29:835–46.10.1016/j.rser.2013.08.099

[44] [44] Behar O, Khellaf A, Mohammedi K. A review of studies on central receiver solar thermal power plants. Renew Sust Energ Rev. 2013;23:12–39.10.1016/j.rser.2013.02.017

[45] [45] Yogev A, Kribus A, Epstein M, et al. Solar “tower reflector” systems: a new approach for high-temperature solar plants. Int J Hydrog Energy. 1998;23(4):239–45.10.1016/S0360-3199(97)00059-1

[46] [46] Mills D. Advances in solar thermal electricity technology. Sol Energy. 2004;76(1-3):19–31.10.1016/S0038-092X(03)00102-6

[47] [47] Yu N, Genevet P, Kats MA, et al. Light propagation with phase discontinuities: generalized laws of reflection and refraction. Science. 2011;334(6054):333–7.10.1126/science.1210713

[48] [48] Yu N, Capasso F. Flat optics with designer metasurfaces. Nat Mater. 2014;13(2):139–50.10.1038/nmat3839

[49] [49] Chen H-T, Taylor AJ, Yu N. A review of metasurfaces: physics and applications. Rep Prog Phys. 2016;79(7):076401.10.1088/0034-4885/79/7/076401

[50] [50] Ding F, Pors A, Bozhevolnyi SI. Gradient metasurfaces: a review of fundamentals and applications. Rep Prog Phys. 2017;81(2):026401.10.1088/1361-6633/aa8732

[51] [51] Genevet P, Capasso F, Aieta F, et al. Recent advances in planar optics: from plasmonic to dielectric metasurfaces. Optica. 2017;4(1):139–52.10.1364/OPTICA.4.000139

[52] [52] Meinzer N, Barnes WL, Hooper IR. Plasmonic meta-atoms and metasurfaces. Nat Photonics. 2014;8(12):889–98.10.1038/nphoton.2014.247

[53] [53] Chen WT, Zhu AY, Capasso F. Flat optics with dispersion-engineered metasurfaces. Nat Rev Mater. 2020;5(8):604–20.10.1038/s41578-020-0203-3

[54] [54] Hsiao HH, Chu CH, Tsai DP. Fundamentals and applications of metasurfaces. Small Methods. 2017;1(4):1600064.10.1002/smtd.201600064

[55] [55] Yoon G, Tanaka T, Zentgraf T, et al. Recent progress on metasurfaces: applications and fabrication. J Phys D Appl Phys. 2021;54(38):383002.

[56] [56] Luo X, Tsai D, Gu M, et al. Extraordinary optical fields in nanostructures: from sub-diffraction-limited optics to sensing and energy conversion. Chem Soc Rev. 2019;48(8):2458–94.10.1039/C8CS00864G

[57] [57] Lee S-Y, Kim K, Kim S-J, et al. Plasmonic meta-slit: shaping and controlling near-field focus. Optica. 2015;2(1):6–13.10.1364/OPTICA.2.000006

[58] [58] Chen X, Zhang Y, Huang L, et al. Ultrathin metasurface laser beam shaper. Adv Optical Mat. 2014;2(10):978–82.10.1002/adom.201400186

[59] [59] Sun S, Yang K-Y, Wang C-M, et al. High-efficiency broadband anomalous reflection by gradient meta-surfaces. Nano Lett. 2012;12(12):6223–9.10.1021/nl3032668

[60] [60] Walther B, Helgert C, Rockstuhl C, et al. Photonics: spatial and spectral light shaping with Metamaterials. Adv Mater. 2012;24(47):6251.10.1002/adma.201290300

[61] [61] Zheng G, Mühlenbernd H, Kenney M, et al. Metasurface holograms reaching 80% efficiency. Nat Nanotechnol. 2015;10(4):308–12.10.1038/nnano.2015.2

[62] [62] Sun S, He Q, Xiao S, et al. Gradient-index meta-surfaces as a bridge linking propagating waves and surface waves. Nat Mater. 2012;11(5):426–31.10.1038/nmat3292

[63] [63] Chen K, Feng Y, Monticone F, et al. A reconfigurable active huygens' metalens. Adv Mater. 2017;29(17):1606422.10.1002/adma.201606422

[64] [64] Cui TJ, Qi MQ, Wan X, et al. Coding metamaterials, digital metamaterials and programmable metamaterials. Light Sci Appl. 2014;3(10):e218.10.1038/lsa.2014.99

[65] [65] Kamali SM, Arbabi E, Arbabi A, et al. Angle-multiplexed metasurfaces: encoding independent wavefronts in a single metasurface under different illumination angles. Physical Review X. 2017;7(4):041056.10.1103/PhysRevX.7.041056

[66] [66] Wang L, Kruk S, Tang H, et al. Grayscale transparent metasurface holograms. Optica. 2016;3(12):1504–5.10.1364/OPTICA.3.001504

[67] [67] Genevet P, Capasso F. Holographic optical metasurfaces: a review of current progress. Rep Prog Phys. 2015;78(2):024401.10.1088/0034-4885/78/2/024401

[68] [68] Deng ZL, Deng J, Zhuang X, et al. Diatomic metasurface for vectorial holography. Nano Lett. 2018;18(5):2885–92.10.1021/acs.nanolett.8b00047

[69] [69] Ding X, Monticone F, Zhang K, et al. Ultrathin Pancharatnam–Berry metasurface with maximal cross-polarization efficiency. Adv Mater. 2015;27(7):1195–200.10.1002/adma.201405047

[70] [70] Yu N, Aieta F, Genevet P, et al. A broadband, background-free quarter-wave plate based on plasmonic metasurfaces. Nano Lett. 2012;12(12):6328–33.10.1021/nl303445u

[71] [71] Perez-Palomino G, Page JE, Arrebola M, et al. A design technique based on equivalent circuit and coupler theory for broadband linear to circular polarization converters in reflection or transmission mode. IEEE Trans Antennas Propag. 2018;66(5):2428–38.10.1109/TAP.2018.2809664

[72] [72] Grady NK, Heyes JE, Chowdhury DR, et al. Terahertz metamaterials for linear polarization conversion and anomalous refraction. Science. 2013;340(6138):1304–7.10.1126/science.1235399

[73] [73] Rodríguez-Fortuño FJ, Marino G, Ginzburg P, et al. Near-field interference for the unidirectional excitation of electromagnetic guided modes. Science. 2013;340(6130):328–30.10.1126/science.1233739

[74] [74] Pors A, Nielsen MG, Bernardin T, et al. Efficient unidirectional polarization-controlled excitation of surface plasmon polaritons. Light: Sci App. 2014;3(8):e197.10.1038/lsa.2014.78

[75] [75] Lin J, Mueller JB, Wang Q, et al. Polarization-controlled tunable directional coupling of surface plasmon polaritons. Science. 2013;340(6130):331–4.10.1126/science.1233746

[76] [76] Wu L, Oudich M, Cao W, et al. Routing acoustic waves via a metamaterial with extreme anisotropy. Phys Rev Appl. 2019;12(4):044011.10.1103/PhysRevApplied.12.044011

[77] [77] Cao WK, Wu LT, Zhang C, et al. Asymmetric transmission of acoustic waves in a waveguide via gradient index metamaterials. Sci Bull. 2019;64(12):808–13.10.1016/j.scib.2019.01.002

[78] [78] Li X, Xiao S, Cai B, et al. Flat metasurfaces to focus electromagnetic waves in reflection geometry. Opt Lett. 2012;37(23):4940–2.10.1364/OL.37.004940

[79] [79] Pors A, Nielsen MG, Eriksen RL, et al. Broadband focusing flat mirrors based on plasmonic gradient metasurfaces. Nano Lett. 2013;13(2):829–34.10.1021/nl304761m

[80] [80] Shen K, Duan Y, Ju P, et al. On-chip optical levitation with a metalens in vacuum. Optica. 2021;8(11):1359–62.10.1364/OPTICA.438410

[81] [81] Zhang C, Cao WK, Wu LT, et al. A reconfigurable active acoustic metalens. Appl Phys Lett. 2021;118(13):133502.10.1063/5.0045024

[82] [82] Yang W, Chen K, Zheng Y, et al. Angular-adaptive reconfigurable spin-locked Metasurface Retroreflector. Adv Sci. 2021;8(21):2100885.10.1002/advs.202100885

[83] [83] Karvounis A, Gholipour B, MacDonald KF, et al. All-dielectric phase-change reconfigurable metasurface. Appl Phys Lett. 2016;109(5):051103.10.1063/1.4959272

[84] [84] Huang C, Yang J, Wu X, et al. Reconfigurable metasurface cloak for dynamical electromagnetic illusions. Acs Photonics. 2017;5(5):1718–25.10.1021/acsphotonics.7b01114

[85] [85] Lu X, Dong B, Zhu H, et al. Two-channel vo2 memory meta-device for terahertz waves. Nanomaterials. 2021;11(12):3409.10.3390/nano11123409

[86] [86] Cao WK, Zhang C, Wu LT, et al. Tunable acoustic metasurface for three-dimensional wave manipulations. Phys Rev Appl. 2021;15(2):024026.10.1103/PhysRevApplied.15.024026

[87] [87] Dong B, Zhang C, Guo G, et al. BST-silicon hybrid terahertz meta-modulator for dual-stimuli-triggered opposite transmission amplitude control. Nanophotonics. 2022;11(9):2075–83.10.1515/nanoph-2022-0018

[88] [88] Lee D, Gwak J, Badloe T, et al. Metasurfaces-based imaging and applications: from miniaturized optical components to functional imaging platforms. Nanoscale Adv. 2020;2(2):605–25.10.1039/C9NA00751B

[89] [89] Li Z, Lin P, Huang Y-W, et al. Meta-optics achieves RGB-achromatic focusing for virtual reality. Sci Adv. 2021;7(5):eabe4458.10.1126/sciadv.abe4458

[90] [90] Hoffman DM, Girshick AR, Akeley K, et al. Vergence–accommodation conflicts hinder visual performance and cause visual fatigue. J Vis. 2008;8(3):33.10.1167/8.3.33

[91] [91] Liu S, Li Y, Zhou P, et al. A multi-plane optical see-through head mounted display design for augmented reality applications. J Soc Inf Disp. 2016;24(4):246–51.10.1002/jsid.435

[92] [92] Lee G-Y, Hong J-Y, Hwang S, et al. Metasurface eyepiece for augmented reality. Nat Commun. 2018;9(1):1–10.10.1038/s41467-018-07011-5

[93] [93] Jang C, Bang K, Li G, et al. Holographic near-eye display with expanded eye-box. ACM Transact Graphics (TOG). 2018;37(6):1–14.10.1145/3272127.3275069

[94] [94] Lee S, Jo Y, Yoo D, et al. Tomographic near-eye displays. Nat Commun. 2019;10(1):1–10.

[95] [95] Lalanne P, Astilean S, Chavel P, et al. Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings. Opt Lett. 1998;23(14):1081–3.10.1364/OL.23.001081

[96] [96] Liang H, Martins A, Borges B-HV, et al. High performance metalenses: numerical aperture, aberrations, chromaticity, and trade-offs. Optica. 2019;6(12):1461–70.10.1364/OPTICA.6.001461

[97] [97] Decker M, Staude I, Falkner M, et al. High-efficiency dielectric Huygens’ surfaces. Adv Optic Mater. 2015;3(6):813–20.10.1002/adom.201400584

[98] [98] Ni X, Ishii S, Kildishev AV, et al. Ultra-thin, planar, Babinet-inverted plasmonic metalenses. Light: Sci App. 2013;2(4):e72.10.1038/lsa.2013.28

[99] [99] Akahane Y, Asano T, Song B-S, et al. High-Q photonic nanocavity in a two-dimensional photonic crystal. Nature. 2003;425(6961):944–7.10.1038/nature02063

[100] [100] Liu W, Li Z, Cheng H, et al. Metasurface enabled wide-angle Fourier lens. Adv Mater. 2018;30(23):1706368.10.1002/adma.201706368

[101] [101] Koshelev K, Kivshar Y. Dielectric resonant metaphotonics. Acs Photonics. 2020;8(1):102–12.10.1021/acsphotonics.0c01315

[102] [102] Yang B, Liu W, Li Z, et al. Ultrahighly saturated structural colors enhanced by multipolar-modulated metasurfaces. Nano Lett. 2019;19(7):4221–8.10.1021/acs.nanolett.8b04923

[103] [103] Porto J, Garcia-Vidal F, Pendry J. Transmission resonances on metallic gratings with very narrow slits. Phys Rev Lett. 1999;83(14):2845.10.1103/PhysRevLett.83.2845

[104] [104] Li J, Chen Y, Hu Y, et al. Magnesium-based metasurfaces for dual-function switching between dynamic holography and dynamic color display. ACS Nano. 2020;14(7):7892–8.10.1021/acsnano.0c01469

[105] [105] Chen Y, Duan X, Matuschek M, et al. Dynamic color displays using stepwise cavity resonators. Nano Lett. 2017;17(9):5555–60.10.1021/acs.nanolett.7b02336

[106] [106] Yang Z, Chen Y, Zhou Y, et al. Microscopic interference full-color printing using grayscale-patterned Fabry–Perot resonance cavities. Adv Optical Mat. 2017;5(10):1700029.10.1002/adom.201700029

[107] [107] Wang Y, Zheng M, Ruan Q, et al. Stepwise-nanocavity-assisted transmissive color filter array microprints. Research. 2018;2018:8109054.

[108] [108] Verslegers L, Catrysse PB, Yu Z, et al. Planar lenses based on nanoscale slit arrays in a metallic film. Nano Lett. 2009;9(1):235–8.10.1021/nl802830y

[109] [109] Kumar K, Duan H, Hegde RS, et al. Printing colour at the optical diffraction limit. Nat Nanotechnol. 2012;7(9):557–61.10.1038/nnano.2012.128

[110] [110] Segal N, Keren-Zur S, Hendler N, et al. Controlling light with metamaterial-based nonlinear photonic crystals. Nat Photonics. 2015;9(3):180–4.10.1038/nphoton.2015.17

[111] [111] Huang X, Lai Y, Hang ZH, et al. Dirac cones induced by accidental degeneracy in photonic crystals and zero-refractive-index materials. Nat Mater. 2011;10(8):582–6.10.1038/nmat3030

[112] [112] Yang J, Ghimire I, Wu PC, et al. Photonic crystal fiber metalens. Nanophotonics. 2019;8(3):443–9.10.1515/nanoph-2018-0204

[113] [113] Chang-Hasnain CJ, Yang W. High-contrast gratings for integrated optoelectronics. Adv Opt Photon. 2012;4(3):379–440.10.1364/AOP.4.000379

[114] [114] Lin D, Fan P, Hasman E, et al. Dielectric gradient metasurface optical elements. Science. 2014;345(6194):298–302.10.1126/science.1253213

[115] [115] Huang MC, Zhou Y, Chang-Hasnain CJ. A surface-emitting laser incorporating a high-index-contrast subwavelength grating. Nat Photonics. 2007;1(2):119–22.10.1038/nphoton.2006.80

[116] [116] Zhou H, Chen L, Shen F, et al. Broadband achromatic metalens in the midinfrared range. Phys Rev Appl. 2019;11(2):024066.10.1103/PhysRevApplied.11.024066

[117] [117] Khorasaninejad M, Capasso F. Broadband multifunctional efficient meta-gratings based on dielectric waveguide phase shifters. Nano Lett. 2015;15(10):6709–15.10.1021/acs.nanolett.5b02524

[118] [118] Khorasaninejad M, Crozier KB. Silicon nanofin grating as a miniature chirality-distinguishing beam-splitter. Nat Commun. 2014;5(1):1–6.10.1038/ncomms6386

[119] [119] Khorasaninejad M, Zhu AY, Roques-Carmes C, et al. Polarization-insensitive metalenses at visible wavelengths. Nano Lett. 2016;16(11):7229–34.10.1021/acs.nanolett.6b03626

[120] [120] Devlin RC, Khorasaninejad M, Chen WT, et al. Broadband high-efficiency dielectric metasurfaces for the visible spectrum. Proc Natl Acad Sci. 2016;113(38):10473–8.10.1073/pnas.1611740113

[121] [121] Maguid E, Yulevich I, Yannai M, et al. Multifunctional interleaved geometric-phase dielectric metasurfaces. Light: Sci App. 2017;6(8):e17027-e.10.1038/lsa.2017.27

[122] [122] Mueller JB, Rubin NA, Devlin RC, et al. Metasurface polarization optics: independent phase control of arbitrary orthogonal states of polarization. Phys Rev Lett. 2017;118(11):113901.10.1103/PhysRevLett.118.113901

[123] [123] Pancharatnam S. Generalized theory of interference and its applications. In: Proceedings of the Indian Academy of Sciences-section a, 1956. Abstract 6: Springer. p. 398–417.

[124] [124] Berry MV. The adiabatic phase and Pancharatnam's phase for polarized light. J Mod Opt. 1987;34(11):1401–7.10.1080/09500348714551321

[125] [125] Xie X, Pu M, Jin J, et al. Generalized Pancharatnam-Berry phase in rotationally symmetric meta-atoms. Phys Rev Lett. 2021;126(18):183902.10.1103/PhysRevLett.126.183902

[126] [126] Liu W, Li Z, Cheng H, et al. Dielectric resonance-based optical metasurfaces: from fundamentals to applications. Iscience. 2020;23(12):101868.10.1016/j.isci.2020.101868

[127] [127] Brown BR, Lohmann AW. Complex spatial filtering with binary masks. Appl Opt. 1966;5(6):967–9.10.1364/AO.5.000967

[128] [128] Lohmann AW, Paris DP. Binary Fraunhofer holograms, generated by computer. Appl Opt. 1967;6(10):1739–48.10.1364/AO.6.001739

[129] [129] Min C, Liu J, Lei T, et al. Plasmonic nano-slits assisted polarization selective detour phase meta-hologram. Laser Photonics Rev. 2016;10(6):978–85.10.1002/lpor.201600101

[130] [130] Zhang K, Wang Y, Burokur SN, et al. Generating dual-polarized vortex beam by detour phase: from phase gradient metasurfaces to metagratings. IEEE Transact Microwave Theory Techn. 2021;70(1):200–9.10.1109/TMTT.2021.3075251

[131] [131] Lin J, Genevet P, Kats MA, et al. Nanostructured holograms for broadband manipulation of vector beams. Nano Lett. 2013;13(9):4269–74.10.1021/nl402039y

[132] [132] Xie Z, Lei T, Si G, et al., Min C, Liu J, et al. Meta-holograms with full parameter control of wavefront over a 1000 nm bandwidth. Acs Photonics. 2017;4(9):2158–64.10.1021/acsphotonics.7b00710

[133] [133] Poon TC. Digital holography and three-dimensional display: principles and applications: Springer Science & Business Media; 2006.10.1007/0-387-31397-4

[134] [134] Chen X, Huang L, Mühlenbernd H, et al. Dual-polarity plasmonic metalens for visible light. Nat Commun. 2012;3(1):1–6.10.1038/ncomms2207

[135] [135] Wang W, Guo Z, Li R, et al. Ultra-thin, planar, broadband, dual-polarity plasmonic metalens. Photon Res. 2015;3(3):68–71.10.1364/PRJ.3.000068

[136] [136] Luo X. Plasmonic metalens for nanofabrication. Natl Sci Rev. 2018;5(2):137–8.10.1093/nsr/nwx135

[137] [137] Williams C, Montelongo Y, Wilkinson TD. Plasmonic Metalens for narrowband dual-focus imaging. Adv Optical Mat. 2017;5(24):1700811.10.1002/adom.201700811

[138] [138] Chen X, Huang L, Mühlenbernd H, et al. Reversible three-dimensional focusing of visible light with ultrathin Plasmonic flat lens. Adv Optical Mat. 2013;1(7):517–21.10.1002/adom.201300102

[139] [139] Schlickriede C, Waterman N, Reineke B, et al. Imaging through nonlinear metalens using second harmonic generation. Adv Mater. 2018;30(8):1703843.10.1002/adma.201703843

[140] [140] Francesco A, Genevet P, Kat MA, et al. Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces. Nano Lett. 2012;12(9):4932–6.10.1021/nl302516v

[141] [141] Avayu O, Almeida E, Prior Y, et al. Composite functional metasurfaces for multispectral achromatic optics. Nat Commun. 2017;8(1):1–7.10.1038/ncomms14992

[142] [142] Jahani S, Jacob Z. All-dielectric metamaterials. Nat Nanotechnol. 2016;11(1):23–36.10.1038/nnano.2015.304

[143] [143] Kuznetsov AI, Miroshnichenko AE, Brongersma ML, et al. Optically resonant dielectric nanostructures. Science. 2016;354(6314):aag2472.10.1126/science.aag2472

[144] [144] Cheng J, Jafar-Zanjani S, Mosallaei H. All-dielectric ultrathin conformal metasurfaces: lensing and cloaking applications at 532 nm wavelength. Sci Rep. 2016;6(1):1–10.10.1038/srep38440

[145] [145] Huang K, Deng J, Leong HS, et al. Ultraviolet Metasurfaces of≈ 80% efficiency with antiferromagnetic resonances for optical Vectorial anti-counterfeiting. Laser Photonics Rev. 2019;13(5):1800289.10.1002/lpor.201800289

[146] [146] Zhang C, Divitt S, Fan Q, et al. Low-loss metasurface optics down to the deep ultraviolet region. Light: Sci App. 2020;9(1):1–10.10.1038/s41377-020-0287-y

[147] [147] Hemmatyar O, Abdollahramezani S, Kiarashinejad Y, et al. Full color generation with Fano-type resonant hfo 2 nanopillars designed by a deep-learning approach. Nanoscale. 2019;11(44):21266–74.10.1039/C9NR07408B

[148] [148] Guo L, Hu Z, Wan R, et al. Design of aluminum nitride metalens for broadband ultraviolet incidence routing. Nanophotonics. 2019;8(1):171–80.10.1515/nanoph-2018-0151

[149] [149] Guo L, Xu S, Wan R, et al. Design of aluminum nitride metalens in the ultraviolet spectrum. J Nanophoton. 2018;12(4):043513.

[150] [150] Khorasaninejad M, Chen WT, Devlin RC, et al. Metalenses at visible wavelengths: diffraction-limited focusing and subwavelength resolution imaging. Science. 2016;352(6290):1190–4.10.1126/science.aaf6644

[151] [151] Chen WT, Zhu AY, Sisler J, et al. A broadband achromatic polarization-insensitive metalens consisting of anisotropic nanostructures. Nat Commun. 2019;10(1):1–7.

[152] [152] Chen WT, Zhu AY, Sanjeev V, et al. A broadband achromatic metalens for focusing and imaging in the visible. Nat Nanotechnol. 2018;13(3):220–6.10.1038/s41565-017-0034-6

[153] [153] Groever B, Chen WT, Capasso F. Meta-lens doublet in the visible region. Nano Lett. 2017;17(8):4902–7.10.1021/acs.nanolett.7b01888

[154] [154] Khorasaninejad M, Shi Z, Zhu AY, et al. Achromatic metalens over 60 nm bandwidth in the visible and metalens with reverse chromatic dispersion. Nano Lett. 2017;17(3):1819–24.10.1021/acs.nanolett.6b05137

[155] [155] Chen WT, Zhu AY, Khorasaninejad M, et al. Immersion meta-lenses at visible wavelengths for nanoscale imaging. Nano Lett. 2017;17(5):3188–94.10.1021/acs.nanolett.7b00717

[156] [156] Poulton CV, Byrd MJ, Raval M, et al. Large-scale silicon nitride nanophotonic phased arrays at infrared and visible wavelengths. Opt Lett. 2017;42(1):21–4.10.1364/OL.42.000021

[157] [157] Fan ZB, Shao ZK, Xie MY, et al. Silicon nitride metalenses for close-to-one numerical aperture and wide-angle visible imaging. Phys Rev Appl. 2018;10(1):014005.10.1103/PhysRevApplied.10.014005

[158] [158] Ye M, Ray V, Wu D, et al. Metalens with artificial focus pattern. IEEE Photon Technol Lett. 2020;32(5):251–4.10.1109/LPT.2020.2970507

[159] [159] Park CS, Koirala I, Gao S, et al. Structural color filters based on an all-dielectric metasurface exploiting silicon-rich silicon nitride nanodisks. Opt Express. 2019;27(2):667–79.10.1364/OE.27.000667

[160] [160] Liang H, Lin Q, Xie X, et al. Ultrahigh numerical aperture metalens at visible wavelengths. Nano Lett. 2018;18(7):4460–6.10.1021/acs.nanolett.8b01570

[161] [161] Sell D, Yang J, Doshay S, et al. Visible light metasurfaces based on single-crystal silicon. Acs Photonics. 2016;3(10):1919–25.10.1021/acsphotonics.6b00436

[162] [162] Zhou Z, Li J, Su R, et al. Efficient silicon metasurfaces for visible light. Acs Photonics. 2017;4(3):544–51.10.1021/acsphotonics.6b00740

[163] [163] Emani NK, Khaidarov E, Paniagua-Domínguez R, et al. High-efficiency and low-loss gallium nitride dielectric metasurfaces for nanophotonics at visible wavelengths. Appl Phys Lett. 2017;111(22):221101.10.1063/1.5007007

[164] [164] Chen BH, Wu PC, Su V-C, et al. GaN metalens for pixel-level full-color routing at visible light. Nano Lett. 2017;17(10):6345–52.10.1021/acs.nanolett.7b03135

[165] [165] Wang S, Wu PC, Su V-C, et al. A broadband achromatic metalens in the visible. Nat Nanotechnol. 2018;13(3):227–32.10.1038/s41565-017-0052-4

[166] [166] Grinblat G, Li Y, Nielsen MP, et al. Efficient third harmonic generation and nonlinear subwavelength imaging at a higher-order anapole mode in a single germanium nanodisk. ACS Nano. 2017;11(1):953–60.10.1021/acsnano.6b07568

[167] [167] Wang A, Chen Z, Dan Y. Planar metalenses in the mid-infrared. AIP Adv. 2019;9(8):085327.10.1063/1.5124074

[168] [168] Dong Z, Ho J, Yu YF, et al. Printing beyond sRGB color gamut by mimicking silicon nanostructures in free-space. Nano Lett. 2017;17(12):7620–8.10.1021/acs.nanolett.7b03613

[169] [169] Shrestha S, Overvig AC, Lu M, et al. Broadband achromatic dielectric metalenses. Light: Sci App. 2018;7(1):1–11.10.1038/s41377-018-0078-x

[170] [170] Li J, Wang Y, Liu S, et al. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission. Largest aperture metalens of high numerical aperture and polarization independence for long-wavelength infrared imaging. Opt Express. 2022;30(16):28882–91.10.1364/OE.462251

[171] [171] Shan X, Li Z, Li J, et al. Broadband continuous achromatic and super-dispersive metalens in near-infrared band. J Appl Phys. 2021;131(2):023103.10.1063/5.0073270

[172] [172] Arbabi A, Horie Y, Bagheri M, et al. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission. Nat Nanotechnol. 2015;10(11):937–43.10.1038/nnano.2015.186

[173] [173] Zhang L, Ding J, Zheng H, et al. Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics. Nat Commun. 2018;9(1):1–9.

[174] [174] Shalaginov MY, An S, Yang F, et al. Single-element diffraction-limited fisheye metalens. Nano Lett. 2020;20(10):7429–37.10.1021/acs.nanolett.0c02783

[175] [175] Arbabi A, Horie Y, Ball AJ, et al. Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays. Nat Commun. 2015;6(1):1–6.10.1038/ncomms8069

[176] [176] Majka M, Majka TM. Healthy light source; 2013.

[177] [177] Rodziewicz T, Rajfur M, Teneta J, et al. Modelling and analysis of the influence of solar spectrum on the efficiency of photovoltaic modules. Energy Rep. 2021;7:565–74.10.1016/j.egyr.2021.01.013

[178] [178] Balli F, Sultan M, Lami SK, et al. A hybrid achromatic metalens. Nat Commun. 2020;11(1):1–8.10.1038/s41467-020-17646-y

[179] [179] Yoon G, Kim K, Kim S-U, et al. Printable nanocomposite metalens for high-contrast near-infrared imaging. ACS Nano. 2021;15(1):698–706.10.1021/acsnano.0c06968

[180] [180] Li B, Piyawattanametha W, Qiu Z. Metalens-based miniaturized optical systems. Micromachines. 2019;10(5):310.10.3390/mi10050310

[181] [181] She A, Zhang S, Shian S, et al. Adaptive metalenses with simultaneous electrical control of focal length, astigmatism, and shift. Sci Adv. 2018;4(2):eaap9957.10.1126/sciadv.aap9957

[182] [182] Bayati E, Zhan A, Colburn S, et al. Role of refractive index in metalens performance. Appl Opt. 2019;58(6):1460–6.10.1364/AO.58.001460

[183] [183] Wu Z, Dong F, Zhang S, et al. Broadband dielectric metalens for polarization manipulating and superoscillation focusing of visible light. Acs Photonics. 2019;7(1):180–9.10.1021/acsphotonics.9b01356

[184] [184] Chen C, Song W, Chen JW, et al. Spectral tomographic imaging with aplanatic metalens. Light: Sci App. 2019;8(1):1–8.10.1038/s41377-019-0208-0

[185] [185] Fan ZB, Qiu HY, Zhang HL, et al. A broadband achromatic metalens array for integral imaging in the visible. Light: Sci Appl. 2019;8(1):1–10.10.1038/s41377-019-0178-2

[186] [186] Uenoyama S, Ota R. 40× 40 Metalens Array for improved silicon photomultiplier performance. ACS Photonics. 2021;8(6):1548–55.10.1021/acsphotonics.1c00257

[187] [187] Chang WH, Lin JH, Kuan CH, et al. Generation of concentric space-variant linear polarized light by dielectric metalens. Nano Lett. 2020;21(1):562–8.10.1021/acs.nanolett.0c04021

[188] [188] Kanwal S, Wen J, Yu B, et al. High-efficiency, broadband, near diffraction-limited, dielectric metalens in ultraviolet spectrum. Nanomaterials. 2020;10(3):490.10.3390/nano10030490

[189] [189] Ali F, Aksu S. A hybrid broadband metalens operating at ultraviolet frequencies. Sci Rep. 2021;11(1):1–8.

[190] [190] Kanwal S, Wen J, Yu B, et al. Polarization insensitive, broadband, near diffraction-limited metalens in ultraviolet region. Nanomaterials. 2020;10(8):1439.10.3390/nano10081439

[191] [191] Hu M, Wei Y, Cai H, et al. Polarization-insensitive and achromatic metalens at ultraviolet wavelengths. J Nanophoton. 2019;13(3):036015.10.1117/1.JNP.13.036015

[192] [192] Liu M, Xu N, Wang B, et al. Polarization independent and broadband achromatic metalens in ultraviolet spectrum. Opt Commun. 2021;497:127182.10.1016/j.optcom.2021.127182

[193] [193] Banerji S, Sensale-Rodriguez B. Inverse designed achromatic flat lens operating in the ultraviolet. OSA Continuum. 2020;3(7):1917–29.10.1364/OSAC.395767

[194] [194] Kenney M, Grant J, Hao D, et al. Large area metasurface lenses in the NIR region. In: Modeling aspects in optical metrology VII: SPIE; 2019. p. 56–66.

[195] [195] Phan T, Sell D, Wang EW, et al. High-efficiency, large-area, topology-optimized metasurfaces. Light: Sci App. 2019;8(1):1–9.10.1038/s41377-019-0159-5

[196] [196] Li Q, Wright JB, Chow WW, et al. Single-mode GaN nanowire lasers. Opt Express. 2012;20(16):17873–9.10.1364/OE.20.017873

[197] [197] Li C, Wright JB, Liu S, et al. Nonpolar InGaN/GaN core–shell single nanowire lasers. Nano Lett. 2017;17(2):1049–55.10.1021/acs.nanolett.6b04483

[198] [198] Zhao D, Lin Z, Zhu W, et al. Recent advances in ultraviolet nanophotonics: from plasmonics and metamaterials to metasurfaces. Nanophotonics. 2021;10(9):2283–2308.

[199] [199] Byrnes SJ, Lenef A, Aieta F, et al. Designing large, high-efficiency, high-numerical-aperture, transmissive meta-lenses for visible light. Opt Express. 2016;24(5):5110–24.10.1364/OE.24.005110

[200] [200] Lin Z, Groever B, Capasso F, et al. Topology-optimized multilayered metaoptics. Phys Rev Appl. 2018;9(4):044030.10.1103/PhysRevApplied.9.044030

[201] [201] Wang S, Wu PC, Su V-C, et al. Broadband achromatic optical metasurface devices. Nat Commun. 2017;8(1):1–9.

[202] [202] Hsiao HH, Chen YH, Lin RJ, et al. Integrated resonant unit of metasurfaces for broadband efficiency and phase manipulation. Adv Optical Mat. 2018;6(12):1800031.10.1002/adom.201800031

[203] [203] Wang Y, Chen Q, Yang W, et al. High-efficiency broadband achromatic metalens for near-IR biological imaging window. Nat Commun. 2021;12(1):1–7.

[204] [204] Ndao A, Hsu L, Ha J, et al. Octave bandwidth photonic fishnet-achromatic-metalens. Nat Commun. 2020;11(1):1–6.10.1038/s41467-020-17015-9

[205] [205] Arbabi E, Arbabi A, Kamali SM, et al. Controlling the sign of chromatic dispersion in diffractive optics with dielectric metasurfaces. Optica. 2017;4(6):625–32.10.1364/OPTICA.4.000625

[206] [206] She A, Zhang S, Shian S, et al. Large area metalenses: design, characterization, and mass manufacturing. Opt Express. 2018;26(2):1573–85.10.1364/OE.26.001573

[207] [207] Arbabi A, Arbabi E, Kamali SM, et al. Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations. Nat Commun. 2016;7(1):1–9.10.1038/ncomms13682

[208] [208] Lassalle E, Mass TW, Eschimese D, et al. Imaging properties of large field-of-view quadratic metalenses and their applications to fingerprint detection. Acs Photonics. 2021;8(5):1457–68.10.1021/acsphotonics.1c00237

[209] [209] Monticone F, Valagiannopoulos CA, Alù A. Parity-time symmetric nonlocal metasurfaces: all-angle negative refraction and volumetric imaging. Phys Rev X. 2016;6(4):041018.

[210] [210] Pendry JB. Negative refraction makes a perfect lens. Phys Rev Lett. 2000;85(18):3966.10.1103/PhysRevLett.85.3966

[211] [211] Xu T, Agrawal A, Abashin M, et al. All-angle negative refraction and active flat lensing of ultraviolet light. Nature. 2013;497(7450):470–4.10.1038/nature12158

[212] [212] Kaina N, Lemoult F, Fink M, et al. Negative refractive index and acoustic superlens from multiple scattering in single negative metamaterials. Nature. 2015;525(7567):77–81.10.1038/nature14678

[213] [213] Estakhri NM, Neder V, Knight MW, et al. Visible light, wide-angle graded metasurface for back reflection. Acs Photonics. 2017;4(2):228–35.10.1021/acsphotonics.6b00965

[214] [214] Aieta F, Genevet P, Kats M, et al. Aberrations of flat lenses and aplanatic metasurfaces. Opt Express. 2013;21(25):31530–9.10.1364/OE.21.031530

[215] [215] Martins A, Li K, Li J, et al. On metalenses with arbitrarily wide field of view. Acs Photonics. 2020;7(8):2073–9.10.1021/acsphotonics.0c00479

[216] [216] Chen C, Chen P, Xi J, et al. On-chip monolithic wide-angle field-of-view metalens based on quadratic phase profile. AIP Adv. 2020;10(11):115213.10.1063/5.0020329

[217] [217] Engelberg J, Zhou C, Mazurski N, et al. Near-IR wide-field-of-view Huygens metalens for outdoor imaging applications. Nanophotonics. 2020;9(2):361–70.10.1515/nanoph-2019-0177

[218] [218] Pu M, Li X, Guo Y, et al. Nanoapertures with ordered rotations: symmetry transformation and wide-angle flat lensing. Opt Express. 2017;25(25):31471–7.10.1364/OE.25.031471

[219] [219] Park JS, Zhang S, She A, et al. All-glass, large metalens at visible wavelength using deep-ultraviolet projection lithography. Nano Lett. 2019;19(12):8673–82.10.1021/acs.nanolett.9b03333

[220] [220] Zhang S, Kim MH, Aieta F, et al. High efficiency near diffraction-limited mid-infrared flat lenses based on metasurface reflectarrays. Opt Express. 2016;24(16):18024–34.10.1364/OE.24.018024

[221] [221] Roy T, Zhang S, Jung IW, et al. Dynamic metasurface lens based on MEMS technology. Apl Photonics. 2018;3(2):021302.10.1063/1.5018865

[222] [222] Hu T, Tseng C-K, Fu YH, et al. Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer. Opt Express. 2018;26(15):19548–54.10.1364/OE.26.019548

[223] [223] Li N, Fu YH, Dong Y, et al. Large-area pixelated metasurface beam deflector on a 12-inch glass wafer for random point generation. Nanophotonics. 2019;8(10):1855–61.10.1515/nanoph-2019-0208

[224] [224] Xu Z, Dong Y, Fu YH, et al. Embedded dielectric metasurface based subtractive color filter on a 300mm glass wafer. In: 2019 conference on lasers and electro-optics (CLEO): IEEE; 2019. p. 1–2.

[225] [225] Hu T, Zhong Q, Li N, et al. CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging. Nanophotonics. 2020;9(4):823–30.10.1515/nanoph-2019-0470

[226] [226] Shalaginov MY, An S, Zhang Y, et al. Reconfigurable all-dielectric metalens with diffraction-limited performance. Nat Commun. 2021;12(1):1–8.10.1038/s41467-021-21440-9

[227] [227] Cui Y, Zheng G, Chen M, et al. Reconfigurable continuous-zoom metalens in visible band. Chin Opt Lett. 2019;17(11):111603.10.3788/COL201917.111603

[228] [228] Afridi A, Canet-Ferrer J, Philippet L, et al. Electrically driven varifocal silicon metalens. Acs Photonics. 2018;5(11):4497–503.10.1021/acsphotonics.8b00948

[229] [229] He Q, Sun S, Zhou L. Tunable/reconfigurable metasurfaces: physics and applications. Research. 2019;2019:1849272.

[230] [230] Arbabi E, Arbabi A, Kamali SM, et al. MEMS-tunable dielectric metasurface lens. Nat Commun. 2018;9(1):1–9.10.1038/s41467-018-03155-6

[231] [231] Papaioannou M, Plum E, Rogers ET, et al. All-optical dynamic focusing of light via coherent absorption in a plasmonic metasurface. Light: Sci App. 2018;7(3):17157.10.1038/lsa.2017.157

[232] [232] Zhong JW, An N, Yi NB, et al. Broadband and tunable-focus flat lens with dielectric Metasurface. Plasmonics. 2016;11(2):537–41.10.1007/s11468-015-0087-z

[233] [233] Ahmed R, Butt H. Strain-multiplex Metalens Array for tunable focusing and imaging. Adv Sci. 2021;8(4):2003394.10.1002/advs.202003394

[234] [234] Elsawy MM, Gourdin A, Binois M, et al. Multiobjective statistical learning optimization of RGB metalens. ACS Photon. 2021;8(8):2498–508.10.1021/acsphotonics.1c00753

[235] [235] Yao K, Unni R, Zheng Y. Intelligent nanophotonics: merging photonics and artificial intelligence at the nanoscale. Nanophotonics. 2019;8(3):339–66.10.1515/nanoph-2018-0183

[236] [236] Zhu M, Abdollahramezani S, Hemmatyar O, et al. Linear and nonlinear focusing using reconfigurable all-dielectric Metalens based on phase-change materials. In: Laser science: Optical Society of America; 2020. p. JW6B.

[237] [237] Schlickriede C, Kruk SS, Wang L, et al. Nonlinear imaging with all-dielectric metasurfaces. Nano Lett. 2020;20(6):4370–6.10.1021/acs.nanolett.0c01105

[238] [238] Chen J, Wang K, Long H, et al. Tungsten disulfide–gold nanohole hybrid metasurfaces for nonlinear metalenses in the visible region. Nano Lett. 2018;18(2):1344–50.10.1021/acs.nanolett.7b05033

[239] [239] Li L, Liu Z, Ren X, et al. Metalens-array–based high-dimensional and multiphoton quantum source. Science. 2020;368(6498):1487–90.10.1126/science.aba9779

[240] [240] Almeida E, Shalem G, Prior Y. Subwavelength nonlinear phase control and anomalous phase matching in plasmonic metasurfaces. Nat Commun. 2016;7(1):1–7.10.1038/ncomms10367

[241] [241] Gao Y, Fan Y, Wang Y, et al. Nonlinear holographic all-dielectric metasurfaces. Nano Lett. 2018;18(12):8054–61.10.1021/acs.nanolett.8b04311

[242] [242] Andrén D, Martínez-Llinàs J, Tassin P, et al. Large-scale metasurfaces made by an exposed resist. ACS Photon. 2020;7(4):885–92.10.1021/acsphotonics.9b01809

[243] [243] Yoon G, Kim K, Huh D, et al. Single-step manufacturing of hierarchical dielectric metalens in the visible. Nat Commun. 2020;11(1):1–10.10.1038/s41467-020-16136-5

[244] [244] Saha SK, Wang D, Nguyen VH, et al. Scalable submicrometer additive manufacturing. Science. 2019;366(6461):105–9.10.1126/science.aax8760

[245] [245] Guo LJ. Nanoimprint lithography: methods and material requirements. Adv Mater. 2007;19(4):495–513.10.1002/adma.200600882

[246] [246] Liu Z, Liu N, Schroers J. Nanofabrication through molding. Prog Mater Sci. 2022;125:100891.10.1016/j.pmatsci.2021.100891

[247] [247] Guo M, Qu Z, Min F, et al. Advanced unconventional techniques for sub-100 nm nanopatterning. InfoMat. 2022;4(8):e12323.

[248] [248] Sreenivasan S. Nanoimprint lithography steppers for volume fabrication of leading-edge semiconductor integrated circuits. Microsyst Nanoeng. 2017;3(1):1–19.10.1038/micronano.2017.75

[249] [249] Stewart MD, Johnson SC, Sreenivasan SV, et al. Nanofabrication with step and flash imprint lithography. J Micro/Nanolithography MEMS MOEMS. 2005;4(1):011002.10.1117/1.1862650

[250] [250] Ganesan R, Dumond J, Saifullah MS, et al. Direct patterning of TiO2 using step-and-flash imprint lithography. ACS Nano. 2012;6(2):1494–502.10.1021/nn204405k