[1] [1] CHEN S, XIE X, KAN J, et al. A hydraulic-driven piezoelectric pump with separable channel for drug delivery［J］. Sensors and Actuators A: Physical, 2019, 295: 210-216.

[2] [2] CHEN S, LIU H, JI J, et al. An indirect drug delivery device driven by piezoelectric pump［J］. Smart Materials and Structures, 2020,29(7): 075030.

[3] [3] EASTMAN A, KIMBER M, HIRATA A, et al. Thermal analysis of a low flow piezoelectric air pump［J］. International journal of heat and mass transfer, 2012, 55(9/10): 2461-2471.

[4] [4] TANG Y, JIA M, DING X, et al.Experimental investigation on thermal management performance of an integrated heat sink with a piezoelectric micropump［J］. Applied Thermal Engineering, 2019, 161: 114053.

[5] [5] LI H, LIU J, LI K, et al.A review of recent studies on piezoelectric pumps and their applications［J］. Mechanical Systems and Signal Processing, 2021, 151: 107393.

[6] [6] WU X, HE L, HOU Y, et al. Advances in passive check valve piezoelectric pumps［J］. Sensors and Actuators A: Physical, 2021, 323: 112647.

[7] [7] ZHANG R, YOU F, LV Z, et al. Development and characterization a single-active-chamber piezoelectric membrane pump with multiple passive check valves［J］. Sensors, 2016, 16(12): 2108.

[8] [8] WOO J, SOHN D K, KO H S. Performance and flow analysis of small piezo pump［J］. Sensors and Actuators A: Physical, 2020, 301: 111766.

[9] [9] MA H K, CHEN R H, HSU Y H. Development of a piezoelectric-driven miniature pump for biomedical applications［J］. Sensors and Actuators A: Physical, 2015, 234: 23-33.

[10] [10] CHEN S, QIAN C, CHENG W, et al. A low frequency driven piezoelectric pump with flexible valve［J］. Sensors and Actuators A: Physical, 2021, 319: 112567.

[11] [11] YANG Z, DONG L, WANG M, et al.A miniature piezoelectric pump with high performance［J］. AIP Advances, 2022, 12(6) : 065316.

[12] [12] ZHANG Ruihua, ZHANG Jianhui, ZHU Yinfa, et al. Design and experiment of valves piezoelectric pumps with triangular prism bluff body［J］.Optics and Precision Engineering, 2016,24(2):327-334.

[13] [13] FU Jun, ZHANG Jianhui, WANG Ying, et al. Research on semi-flexible valve piezoelectric pump［J］.Journal of Vibration, Measurement＆ Diagnosis, 2019,39(5): 1005-1010.

[14] [14] SHAN Jie, GUO Lihua, RAN Penghui, et al.Structural Design and optimization of piezoelectric valveless micropump with double-layer pump chamber［J］.Piezoelectris ＆ Acoustooptics, 2022,44(5):746-751.

[15] [15] KAN J, TANG K, LIU G, et al.Development of serial-connection piezoelectric pumps［J］. Sensors and Actuators A: Physical, 2008, 144(2): 321-327.