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Acta Optica Sinica, Volume. 40, Issue 14, 1405001(2020)

Polarization-Independent Multilayer Slanted Grating with High Efficiency and Broad Spectral and Angular Bandwidths Under Normal Incidence

Yunkai Lu1,2, Junjie Yu1、*, Zhengkun Yin1,2, and Changhe Zhou1、**
Author Affiliations
  • 1Laboratory of Information Optics and Optoelectronics Techniques, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (7)
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    References (35)
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    Figures & Tables(7)
    Schematic of a four-layer slanted grating

    Fig. 1. Schematic of a four-layer slanted grating

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    Flowchart of simulated annealing algorithm

    Fig. 2. Flowchart of simulated annealing algorithm

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    Diffraction efficiencies and polarization dependent loss of optimized grating versus incident wavelength under normal incidence

    Fig. 3. Diffraction efficiencies and polarization dependent loss of optimized grating versus incident wavelength under normal incidence

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    Analysis of incident wavelength and angular bandwidth of the polarization-independent four-layer slanted grating with optimized grating parameters. (a) Diffraction efficiency contour versus incident wavelength and angle for TE polarization; (b) diffraction efficiency contour versus incident wavelength and angle for TM polarization; (c) corresponding -1st diffraction angle; (d) average diffraction efficiency map under TE and TM polarizations

    Fig. 4. Analysis of incident wavelength and angular bandwidth of the polarization-independent four-layer slanted grating with optimized grating parameters. (a) Diffraction efficiency contour versus incident wavelength and angle for TE polarization; (b) diffraction efficiency contour versus incident wavelength and angle for TM polarization; (c) corresponding -1st diffraction angle; (d) average diffraction efficiency map under TE and TM polarizations

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    Tolerance analysis of grating duty cycle. (a) Diffraction efficiency contour versus incident wavelength and grating duty cycle for TE polarization; (b) diffraction efficiency contour versus incident wavelength and angle for TM polarization; (c) corresponding PDL contour versus incident wavelength and grating duty cycle

    Fig. 5. Tolerance analysis of grating duty cycle. (a) Diffraction efficiency contour versus incident wavelength and grating duty cycle for TE polarization; (b) diffraction efficiency contour versus incident wavelength and angle for TM polarization; (c) corresponding PDL contour versus incident wavelength and grating duty cycle

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    • Table 1. Comparison of efficiencies calculated by Campbell’s procedure and RCWAo procedure in this article

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      Table 1. Comparison of efficiencies calculated by Campbell’s procedure and RCWAo procedure in this article

      CaseParameterDiffraction orderTE polarizationTM polarization
      CampbellRCWAoCampbellRCWAo
      AReflection-10.01790.01790.02310.0231
      00.01370.01370.00110.0011
      Transmission-10.03980.03990.02270.0227
      00.92860.92860.95310.9531
      BReflection-10.41790.41780.2750.2749
      00.05620.05620.2370.2356
      Transmission-10.02290.02310.0970.0957
      00.50300.50290.3910.3938
      CReflection-10.23590.23580.22470.2224
      00.42670.42680.3070.3092
      Transmission-10.16460.16450.20750.2072
      00.15570.15570.2410.2401

    • Table 2. Dependence of grating performance on fabrication tolerances of the grating depths

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      Table 2. Dependence of grating performance on fabrication tolerances of the grating depths

      VariableVariable change of depthη-1TE(λ) /%η-1TM(λ) /%LPD,max /dB
      h1+5%(558 nm)90.5--97.088.6--97.50.25
      -5%(505 nm)93.7--96.793.0--99.60.24
      h2+5%(575 nm)92.6--97.694.3--98.70.17
      -5%(520 nm)92.9--97.893.2--99.00.16
      h3+5%(1021 nm)92.9--97.994.4--98.90.19
      -5%(924 nm)93.4--97.594.4--98.80.14
      h4+5%(856 nm)93.3--97.794.5--98.70.17
      -5%(774 nm)93.5--97.694.5--98.70.17
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    Yunkai Lu, Junjie Yu, Zhengkun Yin, Changhe Zhou. Polarization-Independent Multilayer Slanted Grating with High Efficiency and Broad Spectral and Angular Bandwidths Under Normal Incidence[J]. Acta Optica Sinica, 2020, 40(14): 1405001

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    Paper Information

    Category: Diffraction and Gratings

    Received: Mar. 4, 2020

    Accepted: Apr. 13, 2020

    Published Online: Jul. 23, 2020

    The Author Email: Yu Junjie (junjiey@siom.ac.cn), Zhou Changhe (chazhou@mail.shcnc.ac.cn)

    DOI:10.3788/AOS202040.1405001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology