Acta Optica Sinica, Volume. 44, Issue 12, 1212002(2024)

Method of in-situ Detection of Ritchey Angle Based on Laser Tracker

Changyu Zeng1,2, Jinpeng Li1,3、*, and Xinrui Wang4
Author Affiliations
  • 1CAS Nanjing Astronomical Instruments Research Center, Nanjing 210042, Jiangsu, China
  • 2School of Astronomy and Space Science, University of Science and Technology of China, Hefei 230026, Anhui, China
  • 3Nanjing Astronomical Instruments Co., Ltd., Chinese Academy of Sciences, Nanjing 210042, Jiangsu, China
  • 4Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Hefei 230031, Anhui, China
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    Figures & Tables(22)
    Diagram of Ritchey-Common test and in-situ detection principle of Ritchey angle
    Interferogram of defocus based on SMR-Laser Interferometer
    Flowchart of Ritchey angle in-situdetection based on laser tracker
    Schematic diagram of sampling of intersected figure
    Defocus light path of SMR
    Schematic diagram of generatrix sampling
    Flowchart for modeling tested plane mirror
    Relationship between measurement accuracy of the Ritchey angle and the number of sampling points. (a) Intersected figure sampling; (b) generatrix sampling
    Effect of Zernike polynomial coefficient residual on significant digit of Ritchey angle
    Diagram of Φ430 mm flat mirror testing
    Take points on the contour generatrix of the plane mirror
    System wave aberration distributions with different Ritchey angle. (a) System wave aberration distribution with θ1=21.12°; (b) system wave aberration distribution with θ2=39.18°
    Detected plane mirror shape
    Distribution of Zernike power coefficients
    Zernike power coefficient deviation and surface residual RMS for laser tracker measurement and compression ratio measurement. (a) Contrast of Zernike power coefficient deviation; (b) contrast of surface residual RMS
    Experimental setup of positioning focus point
    Distributions of geometric position and Zernike power coefficient in different F-number lenses. (a) 3.8; (b) 5; (c) 7; (d) 11
    Centering base of SMR
    • Table 1. Technical parameters of laser tracker

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      Table 1. Technical parameters of laser tracker

      Technical parameterValue
      Maximum distance range /m80
      Maximum horizontal rotation angle /(°)±320
      Maximum vertical rotation angle /(°)-59-79
      Distance measurement accuracy /μm15
      Angular measurement accuracy /(″)±2
    • Table 2. Calculated the Ritchey angle of Φ430 mm plane mirror in simulation

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      Table 2. Calculated the Ritchey angle of Φ430 mm plane mirror in simulation

      Ideal Ritchey angle /(°)Simulation Ritchey angle /(°)Relative error /%
      2019.99980.00100
      3029.99900.00330
      4544.99970.00075
      6060.00030.00050
    • Table 3. Parameter table of optical path simulation model of Ritchey-Common method

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      Table 3. Parameter table of optical path simulation model of Ritchey-Common method

      ParameterValue
      Radius of standard spherical mirror /mm4500
      Distance between the spherical mirror and plane800
      Ritchey angle /(°)39.674 & 49.827
      Semi-diameter of the plane /mm215
      Semi-diameter of the spherical mirror /mm300
    • Table 4. Main technical performance of laser interferometer

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      Table 4. Main technical performance of laser interferometer

      Technical performanceContent
      ConfigurationTwyman-Green interferometer
      Wavelength /nm632.8
      Minimum exposure /[10-6(″)]30
      RMS repeatability<0.001λ (λ=632.8 nm)
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    Changyu Zeng, Jinpeng Li, Xinrui Wang. Method of in-situ Detection of Ritchey Angle Based on Laser Tracker[J]. Acta Optica Sinica, 2024, 44(12): 1212002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Aug. 2, 2023

    Accepted: Oct. 10, 2023

    Published Online: Jun. 12, 2024

    The Author Email: Jinpeng Li (lijinpeng@nairc.ac.cn)

    DOI:10.3788/AOS231348

    CSTR:32393.14.AOS231348

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