Collection Of theses on high power laser and plasma physics, Volume. 14, Issue 1, 904002(2016)
Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements
[1] [1] Wang D Y, English R E, Jr, Aikens D M. Implementation of ISO 10110 optics drawing standards for the National Ignition Facility[C]. SPIE, 1999, 3782: 502-508.
[2] [2] Lawson J K, Wolfe C R, Manes K R, et al. Specification of optical components using the power spectral density function[C]. SPIE, 1995, 2536: 38-50.
[3] [3] Spaeth M L, Manes K R, Widmayer C C, et al. National Ignition Facility wavefront requirements and optical architecture[J]. Optical Engineering, 2004, 43(12): 2854-2865.
[6] [6] Aikens D M, Wolfe C R, Lawson J K. The use of Power Spectral Density (PSD) functions in specifying optics for the National Ignition Facility[C]. SPIE, 1995, 2576: 281-292.
[7] [7] Shen Weixing, Xu Deyan. Power spectral density function estimate in high power laser optical element surface[J]. High Power Laser and Particle Beams, 2000, 12(4): 392-396.
[9] [9] de Groot P, de Lega X C. Interpreting interferometric height measurements using the instrument transfer function[M]//Osten W. Fringe 2005. Heidelberg: Springer Berlin Heidelberg, 2005: 30-37.
[10] [10] Elson J M, Bennett J M. Calculation of the power spectral density from surface profile data[J]. Applied Optics, 1995, 34(1): 201-208.
[11] [11] Youngworth R N, Gallagher B B, Stamper B L. An overview of power spectral density (PSD) calculations[C]. SPIE, 2005, 5869: 58690U.
[12] [12] Williams W H. NIF large optics metrology software: description and algorithms[R]. United States: Lawrence Livermore National Laboratory (LLNL), 2002.
[13] [13] Galigekere R R, Holdsworth D W, Swamy M N S, et al. Moment patterns in the radon space[J]. Optical Engineering, 2000, 39(4): 1088-1097.
[15] [15] Takacs P Z, Barber S, Church E L, et al. 2D spatial frequency considerations in comparing 1D power spectral density measurements[R]. United States: Brookhaven National Laboratory (BNL), 2010: OWE5.
[16] [16] Sykora D M, de Groot P. Instantaneous measurement Fizeau interferometer with high spatial resolution[C]. SPIE, 2011, 8126: 812610.
[17] [17] Church E L, Vorburger T V, Wyant J C. Direct comparison of mechanical and optical measurements of the finish of precision machined optical surfaces[J]. Optical Engineering, 1985, 24(3): 243388.
[18] [18] Takacs P Z, Li M X, Furenlid K, et al. A step-height standard for surface-profiler calibration[C]. SPIE, 1993, 1995: 65-74.
[19] [19] Wolfe C R, Downie J D, Lawson J K. Measuring the spatial frequency transfer function of phase-measuring interferometers for laser optics[C]. SPIE, 1996, 2870: 553-557.
[21] [21] Novak E, Ai C, Wyant J C. Transfer function characterization of laser Fizeau interferometer for high-spatial-frequency phase measurements[C]. SPIE, 1997, 3134: 114-121.
Get Citation
Copy Citation Text
Yang Xianghui, Shen Weixing, Zhang Xuejie, Ma Xiaojun. Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements[J]. Collection Of theses on high power laser and plasma physics, 2016, 14(1): 904002
Category:
Received: Mar. 8, 2016
Accepted: --
Published Online: May. 26, 2017
The Author Email: Xianghui Yang (yangxh_yx@163.com)