Acta Optica Sinica, Volume. 41, Issue 21, 2100001(2021)

Development of Microlens Arrays: From Fabrication to Photonic Applications

Jianjun Li1, Chunyan Chu1, Weitong Lu2, Pingping Zhang2, Gaoling Yang1,2, Haizheng Zhong2,3、*, and Yuejin Zhao1、**
Author Affiliations
  • 1Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 2MIIT Key Laboratory for Low-Dimensional Quantum Structure and Devices, School of Materials Science & Engineering, Beijing Institute of Technology, Beijing 100081, China;
  • 3Shenzhen Research Institute, Beijing Institute of Technology, Shenzhen 518057, China
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    Figures & Tables(14)
    Basic principles of microlens array. (a) Compound eye optical path structure[24]; (b) schematic of uniform illumination by lens[25]; (c) optical interconnection system of a pair of microlenses[26]; (d) schematic of beam shaping by microlens array[29]
    Optical path diagrams in ordinary lens and microlens array for parallel light and point light source. (a) Parallel light; (b) point light source
    Brief development history of microlens array[24,31,34-35,40]
    Fabricating of microlens array by inkjet printing. (a) Specific steps for preparing microlens array by droplet jetting[55]; (b) fabrication process of morphological programmable self-aligning microlens array[64]
    Schematic of manufacturing process of screen-printed microlens array[85]. (a) Scheme of screen printing process; (b) micro-cylindrical hemisphere array fabricated using screen printing; (c) microlens arrays formed by reflowing micro-cylindrical hemisphere array; (d) microlens arrays solidified under UV light
    Fabricating of microlens array by photocuring method. (a) Process for manufacturing microlens by photocuring method; (b) SEM image of concave microlens array[116]
    Method for preparing curved microlens array film[161]. (a) Schematic of microlens film before preparation; (b) schematic of preparation result; (c) simulated result of curved microlens array film
    Flow chart for preparing microlens array based on self-assembly[162]
    Flow chart for preparing grating microlens array by two replications[166]
    Application examples of microlens array imaging. (a) High-performance hemispherical electronic eye camera based on single crystal silicon[170]; (b) on-chip fluorescence microscope with random microlens diffuser[171]; (c) mid-infrared imaging optical system with field switching based on microlens array[179]
    Applications of microlens array in LED. (a) Microlens array diffuser for LED backlighting[187]; (b) light propagation in single chip LEDs and COB-LEDs[194]
    Photonic crystal microlens array used for wide viewing angle display with angle-independent inkjet printing[199]. Inkjet printing photonic crystals on (a) flat Al foil and (b) curved PDMS surface; (c) normalized fluorescent intensity of fluorescence molecule doped photonic crystal domes and flat dots versus detection angle; (d) top-view and side-view fluorescence images of fluorescent photonic crystals
    Preparation process of underwater oil-resistant microlens array with self-cleaning ability[212]
    • Table 1. Ordinary microlens arrays and their main characteristics[45]

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      Table 1. Ordinary microlens arrays and their main characteristics[45]

      Microlens typeSemiconductormicrolens arrayGradient indexmicrolens arrayPhotosensitive glassmicrolens arrayMelt microlensarrayDiffractive opticalmicrolens array
      Preparation processIon beam etchingPhotolithography,ion exchangePhotolithography,heat treatmentHot melt moldingPhotolithography,ion etching
      Lens diameter100 μm10 μm--1 mm150 μm20 μm10 μm--1 mm
      Imaging principleSpherical surfaceGradient refractiveindexSpherical surfaceSpherical surfaceDiffraction
      Production materialInGaAsP/InPOptical glassPhotosensitive glassPhotoresistMultiple materials
      Application scopePolychromatic light
      Application typeRefraction typeRefraction typeRefraction typeRefraction typeDiffraction type
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    Jianjun Li, Chunyan Chu, Weitong Lu, Pingping Zhang, Gaoling Yang, Haizheng Zhong, Yuejin Zhao. Development of Microlens Arrays: From Fabrication to Photonic Applications[J]. Acta Optica Sinica, 2021, 41(21): 2100001

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    Paper Information

    Category: Reviews

    Received: Mar. 18, 2021

    Accepted: May. 18, 2021

    Published Online: Oct. 29, 2021

    The Author Email: Zhong Haizheng (hzzhong@bit.edu.cn), Zhao Yuejin (yjzhao@bit.edu.cn)

    DOI:10.3788/AOS202141.2100001

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