[3] [3] SAFAEI M, SODANO H A, ANTON S R. A review of energy harvesting using piezoelectric materials: state-of-the-art a decade later (2008–2018) ［J］. Smart Mater & Structu, 2019, 28(11): 113001.

[4] [4] ANTON S R, SODANO H A. A review of power harvesting using piezoelectric materials ［J］. Smart Mater & Structu, 2007, 16(3): R1-R21.

[5] [5] KOYAMA D, NAKAMURA K. Electric power generation using vibration of a polyurea piezoelectric thin film ［J］. Appl Acoust, 2009, 71(5): 439-445.

[6] [6] LU F, LEE H, LIM S. Modeling and analysis of micro piezoelectric power generators for micro- electromechanical-systems applications ［J］． Smart Mater & Structu, 2004, 13(1): 57-63．

[7] [7] FANG H,LIU J,XU Z． Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting ［J］. Microelec, 2006, 37(11): 1280-1284

[9] [9] DEBNATH B, KUMAR R. Design and simulation study of a new flared-U shaped springs based MEMS piezoelectric vibration energy harvester ［C］// IEEE Int Conf Comput Power & Commun Technol. Greater Noida, India. 2020: 101-105.

[11] [11] MOCHIDA Y, ILANKO S. On the Rayleigh-Ritz method, Gorman's superposition method and the exact dynamic stiffness method for vibration and stability analysis of continuous systems ［J］. Thin-Walled Structu, 2021, 161: 107470.

[13] [13] HUANG P C, TSAI T H, YANG Y J. Wide-bandwidth piezoelectric energy harvester integrated with parylene-C beam structures ［J］. Microelec Engineer, 2013, 111: 214-219.