Journal of Semiconductors, Volume. 40, Issue 10, 101303(2019)
Perspective: optically-pumped III–V quantum dot microcavity lasers via CMOS compatible patterned Si (001) substrates
Fig. 1. (Color online) (a) The plot of bandgap energy and wavelength versus lattice constant and misfit between III–V and group IV [
Fig. 2. (Color online) (a) Schematic showing polar/nonpolar interface between GaAs and Ge. Mono-atomic steps on Ge surface result in APBs, planes of As–As or Ga–Ga bonds. The antiphase domains (APBs) can also self-annihilate (left) or rise to the epi-layer surface (right). Diatomic steps on the Ge surface (center) do not result in APB formation[
Fig. 3. Optical microscope image of the thermal cracks on III–V/Si surface.
Fig. 4. (Color online) (a) 5 × 5
Fig. 5. (Color online) (a) The schematic of 5-layer InAs/GaAs QD structure grown on Ge substrate for O-band wavelength emission. (b) RT PL spectra of InAs/GaAs QDs on GaAs/Ge substrate and GaAs substrate, respectively. Inset: Zoomed-in cross-sectional TEM image of InAs/GaAs QDs on GaAs/Ge substrate.
Fig. 6. (Color online) (a) 5 × 5
Fig. 7. (Color online) (a), (b) and (c) Cross-sectional SEM images of U-shape patterned Si substrate, homoepitaxy of 550 nm Si on (111)-faceted Si hollow substrate, and III–V buffer layers on (111)-faceted Si hollow substrate, respectively. All the images are taken along the [110] axis. (d) 10 × 10
Fig. 8. (Color online) (a) Cross-sectional TEM image of GaAs on (111)-faceted Si hollow substrate, taken along [110] axis. (b) Plan-view ECCI to show TDs on GaAs/Si template. (c) Plan-view TEM image of GaAs surface on Si.
Fig. 9. (Color online) (a) RT PL spectra of InAs/GaAs QDs grown on both GaAs and GaAs/Si (001) substrates, for O-band emission. Inset: 1 × 1
Fig. 10. (Color online) Schematic diagrams of (a) microdisk laser structure and (b) microdisk laser on GaAs/Si (001) substrate. (c) and (d) Tilted SEM images of microdisk lasers on GaAs (001) and GaAs/Si (001) substrates, respectively.
Fig. 11. (Color online) Integrated intensity of microdisk lasers versus the power of pump laser on (a) GaAs substrate and (c) Si (001) substrate, respectively. Inset: the log–log plot of ‘L–L curve’. PL spectra of microdisk lasers on (b) GaAs substrate and (d) Si (001) substrate, respectively, under different pump powers.
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Wenqi Wei, Qi Feng, Zihao Wang, Ting Wang, Jianjun Zhang. Perspective: optically-pumped III–V quantum dot microcavity lasers via CMOS compatible patterned Si (001) substrates[J]. Journal of Semiconductors, 2019, 40(10): 101303
Category: Reviews
Received: Jul. 13, 2019
Accepted: --
Published Online: Sep. 22, 2021
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