Acta Optica Sinica, Volume. 32, Issue 6, 631005(2012)
Influence of Annealing Temperatures on Optical Properties of HfSixOy Thin Films Prepared by Magnetron Sputtering
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Tian Hao, Liu Zhengtang, Feng Liping, Gao Qianqian, Liu Wenting. Influence of Annealing Temperatures on Optical Properties of HfSixOy Thin Films Prepared by Magnetron Sputtering[J]. Acta Optica Sinica, 2012, 32(6): 631005
Paper Information
Category: Thin Films
Received: Dec. 16, 2011
Accepted: --
Published Online: May. 16, 2012
The Author Email: Hao Tian (tianhao508@gmail.com)
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