Fig. 1. Optical system of three-mirror anastigmat telescope

Fig. 2. Primary mirror support structure

Fig. 3. Design of flexible mount

Fig. 4. Schematic relationship between loads and deformation of flexible mount at free side

Fig. 5. Schematic distribution of forces on mirror under self-weight

Fig. 6. Comparison of finite element analysis (FEA) and theoretical calculation results for axial force on flexure. (a) FEA results; (b) theoretical calculation results

Fig. 7. Relationship between RMS and ε2

Fig. 8. Relationship between RMS and ΔFz

Fig. 9. Relationship between RMS of mirror surface and support depth of flexible mount. (a) FEA results; (b) theoretical calculation results

Fig. 10. Surface deformation of mirror under self-weight in x direction (rigid-body displacement removed)

Fig. 11. Surface deformation of mirror under self-weight in -x direction (rigid-body displacement removed)

Fig. 12. Optical inspection of mirror

Fig. 13. Surface figure of mirror tested in 0° direction

Fig. 14. Surface figure of mirror tested in 180° direction

Fig. 15. Dynamic test scene of mirror

Fig. 16. Frequency sweep vibration test results of mirror. (a) x direction; (b) y direction; (c) z direction