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Laser & Optoelectronics Progress, Volume. 54, Issue 9, 91403(2017)

Fabrication of Piezoelectric Ceramic Microstructure Based on Excimer Laser

Li Yigui1、*, Cai Jindong2, Huang Yuan2, Lü Tong2, Yan Ping2, and Wang Huan1
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    Article index updated: Sep. 14, 2025

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    Li Yigui, Cai Jindong, Huang Yuan, Lü Tong, Yan Ping, Wang Huan. Fabrication of Piezoelectric Ceramic Microstructure Based on Excimer Laser[J]. Laser & Optoelectronics Progress, 2017, 54(9): 91403

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Mar. 30, 2017

    Accepted: --

    Published Online: Sep. 6, 2017

    The Author Email: Li Yigui (ygli@sit.edu.cn)

    DOI:10.3788/lop54.091403

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology