Piezoelectrics & Acoustooptics, Volume. 44, Issue 3, 467(2022)
Polishing Mechanism and Processing Technology of Germanium Single Crystal Under Acidic SiO2 Polishing Solution
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GAO Xing, GU Yue, XIA Weidong, DONG Honglin, GAN Yu, XU Yang, DING Yuchong. Polishing Mechanism and Processing Technology of Germanium Single Crystal Under Acidic SiO2 Polishing Solution[J]. Piezoelectrics & Acoustooptics, 2022, 44(3): 467
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Received: Dec. 15, 2021
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Published Online: Jul. 24, 2022
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