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Chinese Journal of Lasers, Volume. 41, Issue 6, 612001(2014)

Effects of Etch Holes on Optical Properties of Micro Electro Mechanical System Deformable Mirror

Cai Dongmei*, Ti Peipei, Jia Peng, and Wang Dong
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    Cai Dongmei, Ti Peipei, Jia Peng, Wang Dong. Effects of Etch Holes on Optical Properties of Micro Electro Mechanical System Deformable Mirror[J]. Chinese Journal of Lasers, 2014, 41(6): 612001

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    Received: Dec. 5, 2013

    Accepted: --

    Published Online: May. 22, 2014

    The Author Email: Cai Dongmei (dm_cai@163.com)

    DOI:10.3788/cjl201441.0612001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology