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Acta Optica Sinica, Volume. 30, Issue 1, 287(2010)

Determination of Structural Parameters for Obliquely Deposited Sculptured Thin Film

Qi Hongji1,2、*, Wang Qingyun1, Xiao Xiudi1, Yi Kui1, He Hongbo1, and Fan Zhengxiu1
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    Article index updated: Sep. 10, 2025

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    Qi Hongji, Wang Qingyun, Xiao Xiudi, Yi Kui, He Hongbo, Fan Zhengxiu. Determination of Structural Parameters for Obliquely Deposited Sculptured Thin Film[J]. Acta Optica Sinica, 2010, 30(1): 287

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    Paper Information

    Category: Thin Films

    Received: Feb. 24, 2009

    Accepted: --

    Published Online: Feb. 1, 2010

    The Author Email: Qi Hongji (qhj@siom.ac.cn)

    DOI:10.3788/aos20103001.0287

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology