Acta Optica Sinica, Volume. 45, Issue 14, 1420021(2025)
Structural Optimization of In-Situ Modulated Phase-Change Photonic Multilevel Devices
Fig. 1. Layout design and thermal distribution simulation results. (a)(d) I-shaped structure; (b)(e) butterfly-shaped structure and (c)(f) U-shaped structure
Fig. 2. Potential distribution of the U-shaped heating region (the solid line box representing the metal electrode, the ITO heater in the dashed line box and the arrow representing the direction of current I)
Fig. 3. Device fabrication process and characterization. (a) Device fabrication process; (b) microscope characterization; (c) scanning electron microscopy characterization
Fig. 4. In-situ modulation testing system and test results. (a) Schematic diagram of the device testing system, with insets illustrating the fiber array alignment and probe operation details; (b) device test results, normalized transmittance across different operational states (bar chart) and fitted transmittance curve (curve segment)
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Bing Song, Ganlin Xiong, Hengyu Zhang, Yuan Tian, Xinmeng Hao, Cen Liao, Qingjiang Li. Structural Optimization of In-Situ Modulated Phase-Change Photonic Multilevel Devices[J]. Acta Optica Sinica, 2025, 45(14): 1420021
Category: Optics in Computing
Received: Mar. 4, 2025
Accepted: Apr. 15, 2025
Published Online: Jul. 22, 2025
The Author Email: Bing Song (songbing@nudt.edu.cn)
CSTR:32393.14.AOS250687