Acta Optica Sinica, Volume. 45, Issue 14, 1420021(2025)

Structural Optimization of In-Situ Modulated Phase-Change Photonic Multilevel Devices

Bing Song*, Ganlin Xiong, Hengyu Zhang, Yuan Tian, Xinmeng Hao, Cen Liao, and Qingjiang Li
Author Affiliations
  • College of Electronic Science and Technology, National University of Defense Technology, Changsha 410073, Hunan , China
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    Figures & Tables(5)
    Layout design and thermal distribution simulation results. (a)(d) I-shaped structure; (b)(e) butterfly-shaped structure and (c)(f) U-shaped structure
    Potential distribution of the U-shaped heating region (the solid line box representing the metal electrode, the ITO heater in the dashed line box and the arrow representing the direction of current I)
    Device fabrication process and characterization. (a) Device fabrication process; (b) microscope characterization; (c) scanning electron microscopy characterization
    In-situ modulation testing system and test results. (a) Schematic diagram of the device testing system, with insets illustrating the fiber array alignment and probe operation details; (b) device test results, normalized transmittance across different operational states (bar chart) and fitted transmittance curve (curve segment)
    • Table 1. Block resistance and resistivity

      View table

      Table 1. Block resistance and resistivity

      MaterialITOCrAu
      R  /(Ω/sq)52.2423.040.1759
      d /nm12326.3172
      ρ /(10-8 Ωm)642.660.603.025
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    Bing Song, Ganlin Xiong, Hengyu Zhang, Yuan Tian, Xinmeng Hao, Cen Liao, Qingjiang Li. Structural Optimization of In-Situ Modulated Phase-Change Photonic Multilevel Devices[J]. Acta Optica Sinica, 2025, 45(14): 1420021

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    Paper Information

    Category: Optics in Computing

    Received: Mar. 4, 2025

    Accepted: Apr. 15, 2025

    Published Online: Jul. 22, 2025

    The Author Email: Bing Song (songbing@nudt.edu.cn)

    DOI:10.3788/AOS250687

    CSTR:32393.14.AOS250687

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