Piezoelectrics & Acoustooptics, Volume. 46, Issue 5, 680(2024)

Novel Structure for SuppressingTransverse Leakage in SAW Devices and Its Application

LI Shiguo1... CHU Mengqun1, HU Chengji1, ZHENG Zeyu1, DU Xuesong1, DONG Jiahe1, LU Chuan1, LI Hualin1, CHEN Yanguang1, WANG Hongbin1, MA Jinyi1, and XIAO Qiang12 |Show fewer author(s)
Author Affiliations
  • 1The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China
  • 2Science and Technology on Analog Integrated Circuit Laboratory, Chongqing 400060, China
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    References(10)

    [1] [1] Iwamoto H, Takai T, Takamine Y, et al. Transverse modes in I.H.P. SAW resonator and their suppression method [C]∥Kobe, Japan: Proceedings of the 2018 IEEE International Ultrasonics Symposium (IUS), 2018:1-4.

    [3] [3] KOSKELA J, KNUUTTILA J V, MAKKONEN T, et al. Acoustic loss mechanisms in leaky SAW resonators on lithium tantalate [C]∥San Juan, USA: Proceedings of the 2000 IEEE Ultrasonics Symposium. Proceedings, 2000: 209-213.

    [4] [4] SOLAL M, GRATIER J, GAMBLE K, et al. Transverse modes suppression and loss reduction for buried electrodes SAW devices [C]∥San Diego, CA, USA: Proceedings of the 2010 IEEE International Ultrasonics Symposium, 2010:624-628.

    [5] [5] INOUE S, SOLAl M. LT/quartz layered SAW substrate with suppressed transverse mode generation [C]∥Las Vegas, NV, USA: Proceedings of the 2020 IEEE International Ultrasonics Symposium (IUS), 2020:1-4.

    [6] [6] SOLAL M, CHEN L, GRATIER J. Measurement and FEM/BEM simulation of transverse effects in SAW resonators in lithium tantalate [C]∥San Diego, CA, USA: Proceedings of the 2010 IEEE International Ultrasonics Symposium, 2010:175-180.

    [7] [7] INOUE S, TSUTSUMI J, MATSUDA T, et al. Analysis and suppression of side radiation in leaky SAW resonators [J]. Proc. IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 2007, 54: 1692-1699.

    [8] [8] NAKAMURA H, KOMATSU T, NAKANISHI H, et al. Reduction of transverse leakage for SAW resonators on LiTaO3 substrate [C]∥Dresden, Germany: Proceedings of the 2012 IEEE International Ultrasonics Symposium, 2012:1248-1251.

    [9] [9] XIAO Q, JI X, MA X, et al. A new general form of 2-D coupling-of-modes equations for analysis of waveguiding in surface acoustic wave devices [J]. IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 2020, 67: 1033-1039.

    [12] [12] PLESSKY V, KOSKELA J. Coupling-of-modes analysis of SAW devices [J]. J High Speed Electron Syst, 2000, 10: 867-947.

    [13] [13] MELTAUS J, PLESSKY V P, HARMA S, et al. Low-loss, multimode 5-IDT SAW filter [J]. IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 2005, 52:1013-1019.

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    LI Shiguo, CHU Mengqun, HU Chengji, ZHENG Zeyu, DU Xuesong, DONG Jiahe, LU Chuan, LI Hualin, CHEN Yanguang, WANG Hongbin, MA Jinyi, XIAO Qiang. Novel Structure for SuppressingTransverse Leakage in SAW Devices and Its Application[J]. Piezoelectrics & Acoustooptics, 2024, 46(5): 680

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    Paper Information

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    Received: May. 30, 2024

    Accepted: Jan. 17, 2025

    Published Online: Jan. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.05.011

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