Acta Optica Sinica, Volume. 32, Issue 11, 1112004(2012)

A Precision Length Measurement Route by Phase-Shifting Inteferometry with Mechanical Scanning

Luo Zhiyong*, Gu Yingzi, and Chen Zhaohui
Author Affiliations
  • [in Chinese]
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    References(16)

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    Luo Zhiyong, Gu Yingzi, Chen Zhaohui. A Precision Length Measurement Route by Phase-Shifting Inteferometry with Mechanical Scanning[J]. Acta Optica Sinica, 2012, 32(11): 1112004

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    Paper Information

    Received: Apr. 11, 2012

    Accepted: --

    Published Online: Oct. 25, 2012

    The Author Email: Luo Zhiyong (luozhy@nim.ac.cn)

    DOI:10.3788/aos201232.1112004

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