Design of Large-Angle Uniform Diffraction Metasurface Gratings for Augmented Reality Display

Hui Yang; Chengfeng Wen; Jiacheng Weng; Haifeng Li

doi:10.3788/AOS250685

Acta Optica Sinica, Volume. 45, Issue 11, 1105001(2025)

Design of Large-Angle Uniform Diffraction Metasurface Gratings for Augmented Reality Display

Hui Yang¹, Chengfeng Wen¹, Jiacheng Weng¹, and Haifeng Li^1,2、*

¹State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang , China

²Jiaxing Research Institute, Zhejiang University, Jiaxing 314000, Zhejiang , China

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Figures & Tables(16)

$Schematic diagram of grating design based on equivalent refractive index theory$

Fig. 1. Schematic diagram of grating design based on equivalent refractive index theory

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Fig. 2. Augmented reality display system based on waveguide coupling

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Fig. 3. Schematic diagrams of grating structure. (a) Front view; (b) top view; (c) three-dimensional diagram

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$Optimal solution set for uniformity and average diffraction efficiency under TE polarization$

Fig. 4. Optimal solution set for uniformity and average diffraction efficiency under TE polarization

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$Diffraction efficiency distribution of full field of view with simultaneous incidence of TE and TM polarized lights$

Fig. 5. Diffraction efficiency distribution of full field of view with simultaneous incidence of TE and TM polarized lights

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$Relationship between diffraction efficiency and grating parameters at different angles of field of view. (a) h; (b) w1; (c) s; (d) w2$

Fig. 6. Relationship between diffraction efficiency and grating parameters at different angles of field of view. (a) h; (b) $w_{1}$ ; (c) s; (d) $w_{2}$

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$Relationship between diffraction efficiency and incident wavelength at different angles of field of view$

Fig. 7. Relationship between diffraction efficiency and incident wavelength at different angles of field of view

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Fig. 8. Processing flow of metasurface grating

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Fig. 9. Image of grating obtained by scanning electron microscope

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Fig. 10. Light path diagram for test of grating efficiency. (a) Light path; (b) location of light out-coupling

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Fig. 11. Distribution of machining grating

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Fig. 12. Optical path diagram for testing range of grating field of view. (a) Light path; (b) image effect

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Fig. 13. Mass production diagram of metasurface structure

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Table 1. Optimal period, height and efficiency obtained with different number of sub-periods

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Table 1. Optimal period, height and efficiency obtained with different number of sub-periods

M					$Λ$ /μm	h /μm	Normal incidence diffraction efficiency	Average diffraction efficiency
2	1.0000	—	—	—	0.506	0.159	0.4395	0.4487
3	0.3904	1.0000	—	—	0.479	0.248	0.7570	0.6649
4	0.2359	0.5692	1.0000	—	0.465	0.256	0.7123	0.6214
5	0.1678	0.3904	0.6678	1.0000	0.467	0.279	0.7277	0.6111

Table 2. Effects generated by changes in grating structure parameters
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Table 2. Effects generated by changes in grating structure parameters
Parameter Variation /nm Average efficiency Uniformity of efficiency /%
h ±15 ≥0.517 ≥82.36
$w_{1}$ ±15 ≥0.523 ≥85.72
s ±15 ≥0.533 ≥85.59
$w_{2}$ ±15 ≥0.544 ≥87.30

Table 3. Test results of diffraction efficiency

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Table 3. Test results of diffraction efficiency

Angle of incidence ( $θ, φ$ )	(0°, 0°)	(5°, 0°)	(10°, 0°)	(15°, 0°)	(-5°, 0°)	(-10°, 0°)	(-15°, 0°)
Diffraction efficiency	0.397	0.383	0.362	0.355	0.333	0.355	0.362
Angle of incidence ( $θ, φ$ )	(5°,90°)	(15°, 90°)	(25°, 90°)	(-5°, 90°)	(-15°, 90°)	(-25°, 90°)	—
Diffraction efficiency	0.390	0.369	0.355	0.376	0.369	0.348	—

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Hui Yang, Chengfeng Wen, Jiacheng Weng, Haifeng Li. Design of Large-Angle Uniform Diffraction Metasurface Gratings for Augmented Reality Display[J]. Acta Optica Sinica, 2025, 45(11): 1105001

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