Fig. 1. Schematics of lens planetary rotation system. (a) Schematic; (b) top view

Fig. 2. Change of deposition angle during the rotation of the steep lens

Fig. 3. Variation range of deposition angle of the steep lens

Fig. 4. Transmittance curve of MgF₂ films under different deposition angles (deposition temperature of 25 ℃)

Fig. 5. Reflectance curve of MgF₂ films under different deposition angles (deposition temperature of 25 ℃)

Fig. 6. Refractive index dispersion curve of MgF₂ films under different deposition angles (deposition temperature of 25 ℃)

Fig. 7. Variation of refractive index(at 200 nm) of MgF₂ films with deposition angle (deposition temperature of 25 ℃)

Fig. 8. Schematic of self-shading effect

Fig. 9. Cross-sectional topography of MgF₂ films under different deposition angles (deposition temperature of 25 ℃). (a) 0°; (b) 30°; (c) 60°; (d) 85°

Fig. 10. Transmittance curve of MgF₂ films under different deposition angles (deposition temperature of 200 ℃)

Fig. 11. Reflectance curve of MgF₂ films under different deposition angles (deposition temperature of 200 ℃)

Fig. 12. Refractive index dispersion curve of MgF₂ films under different deposition angles(deposition temperature of 200 ℃)

Fig. 13. Refractive index at 200 nm of MgF₂ films with deposition angle

Fig. 14. XRD spectra of two samples

Fig. 15. Influence of refractive index of MgF₂ films on residual reflectance of 193 nm antireflection films (deposition temperature of 25 ℃)

Fig. 16. Influence of refractive index of MgF₂ films on residual reflectance of 193 nm antireflection films (deposition temperature of 200 ℃)