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Infrared and Laser Engineering, Volume. 53, Issue 4, 20230661(2024)

Dual-wavelength interferometric algorithm based on spatial-temporal conjugate complex function coupling

Jinlong Cheng1, Liyan Zhu1, Lu Chen2, Zhongming Yang3, Zhishan Gao4, and Qun Yuan4、*
Author Affiliations
  • 1School of Physics and Electronic Electrical Engineering, Huaiyin Normal University, Huai'an 223300, China
  • 2Jiangsu Institute of Metrology, Nanjing 210023, China
  • 3School of Information Science and Engineering, Shandong University, Qingdao 266237, China
  • 4School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
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    [1] Cheng Y Y, Wyant J C. Two-wavelength phase shifting interferometry[J]. Applied optics, 23, 4539-4543(1984).

    [2] Zhou H, Hussain M M R, Banerjee P P. A review of the dual-wavelength technique for phase imaging and 3D topography[J]. Light: Advanced Manufacturing, 3, 314-334(2022).

    [3] Fan Guoxiang, Li Yang, Zhang Wenxi, . Full-field heterodyne phase shifting two-wavelength interferometry surface testing technologies[J]. Infrared and Laser Engineering, 51, 20220118(2022).

    [4] Liu Q, Li L, Zhang H, et al. Simultaneous dual-wavelength phase-shifting interferometry for surface topography measurement[J]. Optics and Lasers in Engineering, 124, 105813(2020).

    [5] Wang M, Zhou C, Si S, et al. Extended depth-range dual-wavelength interferometry based on iterative two-step temporal phase-unwrapping[J]. Journal of Modern Optics, 65, 287-297(2018).

    [6] Bitou Y. Two-wavelength phase-shifting interferometry with a superimposed grating displayed on an electrically addressed spatial light modulator[J]. Applied Optics, 44, 1577-1581(2005).

    [7] Zhang W, Lu X, Fei L, et al. Simultaneous phase-shifting dual-wavelength interferometry based on two-step demodulation algorithm[J]. Optics Letters, 39, 5375-5378(2014).

    [8] Xu X, Wang Y, Ji Y, et al. A novel phase retrieval method from three-wavelength in-line phase-shifting interferograms based on positive negative 2π phase shifts[J]. Journal of Modern Optics, 65, 8-15(2018).

    [9] Zhang W, Lu X, Luo C, et al. Principal component analysis based simultaneous dual-wavelength phase-shifting interferometry[J]. Optics Communications, 341, 276-283(2015).

    [10] Li J, Lu X, Xu X, et al. Simultaneous phase-shifting dual-wavelength interferometry based on independent component analysis[J]. Applied Optics, 56, 3673-3678(2017).

    [11] Xu Y, Shen Q, Liang Y, et al. Euclidean matrix norm algorithm for simultaneous dual-wavelength phase-shifting interferometry with blind phase shifts[J]. Applied Optics, 58, 9556-9561(2019).

    [12] Onodera R, Ishii Y. Two-wavelength interferometry that uses a Fourier-transform method[J]. Applied Optics, 37, 7988-7994(1998).

    [13] Cheng J, Gao Z, Bie S, et al. Phase retrieval from the phase-shift Moiré fringe patterns in simultaneous dual-wavelength interferometry[J]. Journal of Optics, 20, 025701(2018).

    [14] Cheng J, Zuo F, Yang Z, et al. Additive-to-multiplicative Moiré fringe transition in simultaneous dual-wavelength interferometry[J]. Optics and Lasers in Engineering, 141, 106561(2021).

    [15] Cheng J, Chen G, Xu L P, et al. Conjugate complex function coupling strategy of interferometric field: Synthetic-wavelength interferometric fringe extraction in simultaneous dual-wavelength interferometry[J]. Optics and Lasers in Engineering, 164, 107495(2023).

    [16] Servin M, Cywiak M, Malacara-Hernandez D, et al. Spatial carrier interferometry from M temporal phase shifted interferograms: Squeezing Interferometry[J]. Optics Express, 16, 9276-9283(2008).

    [17] Li B, Chen L, Tuya W, et al. Carrier squeezing interferometry: suppressing phase errors from the inaccurate phase shift[J]. Optics Letters, 36, 996-998(2011).

    [18] Hariharan P, Oreb B F, Eiju T. Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm[J]. Applied Optics, 26, 2504-2506(1987).

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    Jinlong Cheng, Liyan Zhu, Lu Chen, Zhongming Yang, Zhishan Gao, Qun Yuan. Dual-wavelength interferometric algorithm based on spatial-temporal conjugate complex function coupling[J]. Infrared and Laser Engineering, 2024, 53(4): 20230661

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    Paper Information

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    Received: Nov. 30, 2023

    Accepted: --

    Published Online: Jun. 21, 2024

    The Author Email: Qun Yuan (yuanqun@njust.edu.cn)

    DOI:10.3788/IRLA20230661

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology