Optics and Precision Engineering, Volume. 16, Issue 5, 889(2008)

Influence of drive modes on output signals of micro-fluidic gyroscope

[in Chinese]1 and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(3)

    [1] [1] ZHU R,SU Y,DING H G.A MEMS hybrid inertial sensor based on convection heat transfer[C].The 13th International Conference on Solid-State Sensors.Actuators and Microsystems,seoul,Korea,2005,6:114-116.

    [2] [2] LEUNG A M,JONES J,CZYZEWSKA E,et al..Micromachined accelerometer based on convection heat transfer[C].IEEE,1998,2:627-630.

    [5] [5] ZHU R,DING H G,SU Y,et al..Micromachined gas inertial sensor based on convection heat transfer[J].Sensors and Actuators,2006,1:68-74.

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    [in Chinese], [in Chinese]. Influence of drive modes on output signals of micro-fluidic gyroscope[J]. Optics and Precision Engineering, 2008, 16(5): 889

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    Paper Information

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    Received: Oct. 8, 2007

    Accepted: --

    Published Online: Aug. 17, 2008

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