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Photonic Sensors, Volume. 9, Issue 4, 344(2019)

Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography

Ying SONG*, Bayanheshig, Shuo LI, Shan JIANG, and and Wei WANG
Author Affiliations
  • National Engineering Research Centre for Diffraction Gratings Manufacturing and Application, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Jilin 130033, China
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    Ying SONG, Bayanheshig, Shuo LI, Shan JIANG, and Wei WANG. Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography[J]. Photonic Sensors, 2019, 9(4): 344

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    Paper Information

    Category: Regular

    Received: Oct. 26, 2018

    Accepted: Jan. 9, 2019

    Published Online: Dec. 5, 2019

    The Author Email: Ying SONG (songyingtec@126.com)

    DOI:10.1007/s13320-019-0537-x

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology