Opto-Electronic Engineering, Volume. 47, Issue 6, 190296(2020)

A highly sensitive cantilever temperature sensor for small-area heat source temperature measurement

Xing Zhiming*, Jin Tao, and Zheng Lulu
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    Xing Zhiming, Jin Tao, Zheng Lulu. A highly sensitive cantilever temperature sensor for small-area heat source temperature measurement[J]. Opto-Electronic Engineering, 2020, 47(6): 190296

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    Paper Information

    Category: Article

    Received: May. 31, 2019

    Accepted: --

    Published Online: Oct. 27, 2020

    The Author Email: Xing Zhiming (1076187742@qq.com)

    DOI:10.12086/oee.2020.190296

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