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Optics and Precision Engineering, Volume. 16, Issue 7, 1223(2008)

SCM-based nanomechanical property measurement system of AFM

YAN Yong-da1,2、*, FEI Wei-dong1, HU Zhen-jiang2, CHENG Xiang-jie2, SUN Tao2, and DONG Shen2
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    YAN Yong-da, FEI Wei-dong, HU Zhen-jiang, CHENG Xiang-jie, SUN Tao, DONG Shen. SCM-based nanomechanical property measurement system of AFM[J]. Optics and Precision Engineering, 2008, 16(7): 1223

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    Paper Information

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    Received: Nov. 21, 2007

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: YAN Yong-da (yanyongda@yahoo.com.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology