Spectroscopy and Spectral Analysis, Volume. 36, Issue 8, 2601(2016)
The Effect of Plasma Spatially Resolved During Diamond Film Deposited with HFCVD
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YI Cheng, WANG Chuan-xin, FAN Yong-zhi, DAI Kai, MA Zhi-bin, WANG Sheng-gao, MAN Wei-dong, WU Chao. The Effect of Plasma Spatially Resolved During Diamond Film Deposited with HFCVD[J]. Spectroscopy and Spectral Analysis, 2016, 36(8): 2601
Received: Jun. 5, 2015
Accepted: --
Published Online: Dec. 23, 2016
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