Fig. 1. (a) 3D schematic diagram, (b) cross-section and (c) top-view of the proposed PBS device

Fig. 2. Influence of waveguide width on the effective refractive index. (a) The real part of the refractive index of TE mode and TM mode varying with width in the HSW and VSW; the field distribution of the TE mode in the (b) HSW and (c) VSW, and the field distribution of the TM mode in the (d) HSW and (e) VSW

Fig. 3. Effect of waveguide spacing G. The effect of G on (a) the effective refractive index and (b) the coupling length p. Electric field profile of supermodes at 90 nm of G, (c) TE₀, and (d) TE₁

Fig. 4. The influence of G on ER and IL at the cross and bar ports. Here, W₂ = 302 nm, W₃ = 550 nm, r₁ =4 μm, λ=1.55 μm and G= 90 nm

Fig. 5. The influence of L₁ on ER and IL at the cross and bar ports. Here, W₂=302 nm, W₃=550 nm, r₁=4 μm, λ=1.55 μm andG= 90 nm

Fig. 6. The influence of λ on ER and IL at the cross and bar ports. Here, W₂=302 nm, W₃=550 nm, r₁=4 μm, λ=1.55 μm and G= 90 nm

Fig. 7. The light propagations in the designed PBS of the (a) TE-Ey, (b) TM-Ez

Fig. 8. TE polarization beam splitting and electric field distribution at the corresponding position for the TE mode

Fig. 9. TM polarization beam splitting and electric field distribution at the corresponding position for the TM mode

Fig. 10. The fabrication process of the designed polarization beam splitter

Fig. 11. Effects of different dimensional tolerances on ER and IL. (a) W₁=302 nm, (b) H₁=560 m and (c) H₂=60 nm

Fig. 12. Effects of different dimensional tolerances on ER and IL. (a) H₃=180 nm and (b) H₄=460 m