Research on Detection of High-Order Aspheric Surfaces Using Double Spherical Reflection Compensation

Table 1. Structural data of initial system
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Table 1. Structural data of initial system
Surface No. Radius /mm Thickness /mm Semi-diameters /mm Conic Glass
0
1
-
123.541
800
-93.662
-
50.680
0
0
-
Mirror
2
3
222.355
-1252.100
1673.505
-
130.702
429.974
0
0.578
Mirror

Table 2. Structural data of compensation detection system
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Table 2. Structural data of compensation detection system
Surface
No.
Radius /mm Thickness /mm Semi-diameters /mm Conic Glass
0 - 500 - 0 -
1 173.444 -249.797 50.759 0 Mirror
2 453.264 742.469 218.210 0 Mirror
3 9.150 2.328 2.458 0.578 K50
4 8.579 1261.769 2.698 0
2 -1521.100 430.000 0

Table 3. Manufacturing tolerance parameters
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Table 3. Manufacturing tolerance parameters
Lens Radius of curvature /mm Angle of inclination /（°） Thickness /mm Surface irregularity /λ
Compensator lens 1 ±0.05 ±0.01 - 1/20
Compensator lens 2 ±0.05 ±0.01 - 1/20
Filed lens ±0.01 ±0.01 ±0.01 1/20

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Qian Bai, Yubang Zhang, Mingyong Hu, Zhiwei Feng, Jianfeng Xu, Guangyu Chen, Jinlong Cui. Research on Detection of High-Order Aspheric Surfaces Using Double Spherical Reflection Compensation[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0722002

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