Fig. 1. Schematic diagram of all-optical interference on-chip acceleration sensor

Fig. 2. Influence of cantilever beam structural parameters on its sensitive axis frequency response curve. (a) Width of cantilever beam; (b) thickness of cantilever beam; (c) length of cantilever beam; (d) arm of force

Fig. 3. Finite element simulation of all-optical interference on-chip acceleration sensor. (a) Out-of-plane vibration mode; (b) torsional vibration mode

Fig. 4. MEMS metal etching process flow of acceleration sensor transduction structure

Fig. 5. Physical diagram of transduction structure of all-optical interference on-chip acceleration sensor

Fig. 6. Packaging and debugging system of optical fiber acceleration sensor

Fig. 7. Physical diagram of all-optical interference on-chip acceleration sensor

Fig. 8. Interference spectrum of all-optical interference on-chip acceleration sensor

Fig. 9. Optical demodulation system and acceleration calibration system of acceleration sensor

Fig. 10. Frequency response and linearity tests of the fiber optic accelerometer. (a) Frequency response; (b) linearity

Fig. 11. Minimum detectable acceleration test system

Fig. 12. Phase noise spectrum of all-optical interference on-chip acceleration sensor

Fig. 13. Orthogonal crosstalk of all-optical interference on-chip acceleration sensor