Laser & Optoelectronics Progress, Volume. 62, Issue 13, 1306003(2025)

A Fiber Optic Acceleration Sensor Based on Metal Etching

Jie Zhai1 and Ping Lu1,2、*
Author Affiliations
  • 1School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, Hubei , China
  • 2Optics Valley Laboratory, Wuhan 430074, Hubei , China
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    Aiming at the problem of large volume of fiber optic acceleration sensors processed by traditional metal, a cantilever beam-mass block type on-chip acceleration transducer structure is developed. It is fabricated by metal etching process, with dimensions of only 12 mm×12 mm×0.2 mm, and a Fabry-Perot interference microcavity is constructed. By using the white light phase demodulation technology, a miniaturized one-dimensional fiber optic acceleration sensing is realized. The test results show that the response flat range of the fiber optic accelerometer is about 5?250 Hz, the sensitivity is 22.4 dB (re rad/g), and the minimum detectable acceleration is 228 ng/Hz1/2@100 Hz.

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    Jie Zhai, Ping Lu. A Fiber Optic Acceleration Sensor Based on Metal Etching[J]. Laser & Optoelectronics Progress, 2025, 62(13): 1306003

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    Paper Information

    Category: Fiber Optics and Optical Communications

    Received: Apr. 25, 2025

    Accepted: Jun. 8, 2025

    Published Online: Jul. 15, 2025

    The Author Email: Ping Lu (pluriver@hust.edu.cn)

    DOI:10.3788/LOP251097

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