Laser & Optoelectronics Progress, Volume. 62, Issue 13, 1306003(2025)
A Fiber Optic Acceleration Sensor Based on Metal Etching
Aiming at the problem of large volume of fiber optic acceleration sensors processed by traditional metal, a cantilever beam-mass block type on-chip acceleration transducer structure is developed. It is fabricated by metal etching process, with dimensions of only 12 mm×12 mm×0.2 mm, and a Fabry-Perot interference microcavity is constructed. By using the white light phase demodulation technology, a miniaturized one-dimensional fiber optic acceleration sensing is realized. The test results show that the response flat range of the fiber optic accelerometer is about 5?250 Hz, the sensitivity is 22.4 dB (re rad/g), and the minimum detectable acceleration is 228 ng/Hz1/2@100 Hz.
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Jie Zhai, Ping Lu. A Fiber Optic Acceleration Sensor Based on Metal Etching[J]. Laser & Optoelectronics Progress, 2025, 62(13): 1306003
Category: Fiber Optics and Optical Communications
Received: Apr. 25, 2025
Accepted: Jun. 8, 2025
Published Online: Jul. 15, 2025
The Author Email: Ping Lu (pluriver@hust.edu.cn)