Acta Optica Sinica, Volume. 8, Issue 1, 89(1988)
Fabrication of blazed grating by sloping V-groove structures on silicon
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HUANG XINFAN, LI LIANGZHU, GAO WENQI, YE QUANSHU. Fabrication of blazed grating by sloping V-groove structures on silicon[J]. Acta Optica Sinica, 1988, 8(1): 89
Category: Rapid communications
Received: Dec. 9, 1986
Accepted: --
Published Online: Sep. 16, 2011
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