Laser & Optoelectronics Progress, Volume. 56, Issue 7, 071203(2019)

Methods for Laser Beam Drift Compensation in Laser Alignment Measurement

Yusheng Zhai1、*, Wenlong Liu2, Xinjie Wang2, Zehua Xie1, Saisai Yan1, and Yihang Guo1
Author Affiliations
  • 1 School of Physics and Electronic Engineering, Zhengzhou University of Light Industry, Zhengzhou, Henan 450002, China
  • 2 Mechanical and Electrical Engineering Institute, Zhengzhou University of Light Industry, Zhengzhou, Henan 450002, China
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    Figures & Tables(9)
    Schematic of beam drifts caused by environmental factors. (a) Parallel drift model; (b) angular drift model
    Measurement principle of beam drift caused by air disturbance
    Spectral characteristics of beam drift caused by air disturbance. (a) Signal power spectrum; (b) signal processing result
    Measurement principle of two-dimensional displacement with laser beam drift compensation
    Optical path for differential compensation
    Result of angular drift compensation by differential structure
    Compensation effect of total drift by differential structure
    Common path compensation structure
    Compensation effect of angular drift by common path structure
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    Yusheng Zhai, Wenlong Liu, Xinjie Wang, Zehua Xie, Saisai Yan, Yihang Guo. Methods for Laser Beam Drift Compensation in Laser Alignment Measurement[J]. Laser & Optoelectronics Progress, 2019, 56(7): 071203

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Sep. 29, 2018

    Accepted: Oct. 24, 2018

    Published Online: Jul. 30, 2019

    The Author Email: Yusheng Zhai (hf_sy@sohu.com)

    DOI:10.3788/LOP56.071203

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