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Opto-Electronic Engineering, Volume. 35, Issue 11, 101(2008)

Robustness Analysis of Image Registration Measures to Overlay Area Changing

SHANGGUAN Jin-tai1、*, GUO Hui2, YUE Jin3,4, and YANG Ru-liang3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    SHANGGUAN Jin-tai, GUO Hui, YUE Jin, YANG Ru-liang. Robustness Analysis of Image Registration Measures to Overlay Area Changing[J]. Opto-Electronic Engineering, 2008, 35(11): 101

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    Paper Information

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    Received: Feb. 28, 2008

    Accepted: --

    Published Online: Mar. 1, 2010

    The Author Email: Jin-tai SHANGGUAN (sxczsgjt@yahoo.com.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology